掃描式電子顯微鏡內奈米加工之影像辨識迴授控制方法研究

本研究針對一套可在掃描式電子顯微鏡內執行的三維奈米加工系統，進行奈米加工之R2R控制研究發展及驗證。利用掃描式電子顯微鏡擷取奈米機台之加工結果，以擷取之數位影像作為迴授資訊，並搭配影像辨識之二值化與小波分析等方法做影像辨識與雜訊處理得到加工長度後。假設此機台輸入輸出關係為簡單線性，再運用批次間控制(指數加權移動平均法)的方法調整奈米機台輸入端，並選擇適當的折扣因子以提升控制之收斂速度，使下一次的加工長度與目標值之誤差得到補償。經實驗證實其控制結果最多能使誤差率由40%減少為0.7%。

關鍵字

奈米機台；影像辨識；掃描式電子顯微鏡；批次間控制

並列摘要

The purpose of this research is to perform nano-machine in a scanning electron microscope (SEM) via the run-to-run control and digital image feedbacks. The digital images are obtained by using the wavelet transform and binarization in order to recognize and feedback the digital image information to the picomotor controller; and then obtain the next input data for the actuating controller to achieve the targeted machining precision. To the aforementioned goal, assume first that the nano-machine is a single input single output system and it is a linear relation between inputs and outputs. The control method used is the widely-used Run-to-Run Control (Exponentially Weighted Moving Average) for semiconductor manufacturing processes. This controller is capable of compensating the machining inaccuracy induced by the picomotor drives. Furthermore, efforts are paid to estimate and adjust next control input based on the former input and output data. In this process, an appropriate discount factor values is chosen to quickly reduce the error and converge to the targeted precision. The experiment verifies that the designed controller and the associated factors can reduce the error of the nano-machining process from 40% to 0.7%.

並列關鍵字

image recognition ； run-to-run control ； scanning electron microscope (SEM) ； nano-machine

參考文獻

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國際替代計量

掃描式電子顯微鏡內奈米加工之影像辨識迴授控制方法研究

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