- 學位論文
多孔性陶瓷氣浮元件模擬分析
Porous Ceramics Based Simulation Analysis of Air-Floating Device
摘要
在現今平面液晶顯示器的生產流程中，大型玻璃面板的搬運以吸附式機械手臂或框架支撐讓滾輪來完成搬運過程，兩者皆為接觸式輸送搬運方式；運送過程中易造成大型玻璃面板的損傷及污染，嚴重影響生產良率，因此近來業界研發非接觸式氣浮軸承搬運系統。本文主要探討以非接觸式的多孔性陶瓷氣浮軸承模組替代接觸式輸送系統的可行性，採用數值方法分析氣體流體在多孔性陶瓷氣浮模組下的流動情形，與其在多孔性陶瓷的作用下速度場和壓力的結果。物理模型設計以空氣在穩態流動下，氣體進入陶瓷材料基座，再通過多孔性陶瓷材料後，至懸浮玻璃之間為主要模擬結構。研究先以簡單的單體模組為基礎設計，確認基本條件設定，進而研究由四個單體所構成長條模組的情況，再進一步設計為陣列模組，研究其在懸浮玻璃基板時的結果。由於多孔性介質材料的滲透率是影響流體分佈與流速及玻璃基板承受壓力的主要因素，藉由模擬來分析不同陶瓷材料滲透率數量級對流體流流動行為與玻璃基板承受壓力和速度場變化的情況。研究方法以有限元素分析法為架構的Comsol Multiphysics模擬軟體進行模擬分析，一般流體行為的描述是以那維爾-史托克斯方程式為主，多孔性介質流場的流動情形是藉由布林克曼方程式和達西定律來描述，因為陶瓷材料為多孔性介質，所以針對這些統御方程式進行模擬，最後將模擬結果與在精密機械研究發展中心所進行的實驗結果做分析比較。
並列摘要
Robots with suction pads and automated guided vehicle system are the mainly technologies to transfer glass substrates in TFT-LCD industry. Such contact handling will induce glass damage and contamination to decrease the product yield. Therefore, non-contact handling methods are developed. This research studies the gas flow phenomena for the non-contact porous ceramics levitating module of air bearing by the finite element analysis method. This module is to mount the ceramics tightly on the gas chambers connected by flow channels, and the glass substrate is lifting by the gas while flowing through the channels and porous ceramics. Flow permeability of porous media is the main factor to affect fluid flow behavior. A numerical software Comsol Multiphysics based on the finite element analysis is adopted to analyze the pressure and velocity distribution for different permeability, gas flow rate and glass lifting height. The analysis model considers the Navier-Stokes equation, Brinkman equation and Darcy’s law to understand the flow phenomena of current porous media. Then the simulated results are compared to the experimental measurements made by Precision Machinery Research Development Center.
參考文獻
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