- 學位論文
磁控濺鍍製作CeO2-Al2O3 / Cu / CeO2-Al2O3低輻射玻璃之研究
The Study on the Properties of Al2O3-CeO2 / Cu / Al2O3-CeO2 Multi-films Prepared on Glass Substrate by Reactive Magnetron Sputtering
摘要
鍍有低輻射薄膜的玻璃能夠反射大部分的紅外線和紫外線，同時對可見光也有較高的穿透率。 Low-E玻璃的膜層最基本為三層的介質層/功能層/介質層，功能層大部分都是選用銀(Ag)、銅(Cu)、鋁(Al)等金屬來做為薄膜中間的功能膜層；介質層一般都是選用金屬氧化膜(如：TiO2、SnO2、ZnO、CdO、In2O3、Cd2SnO4、CdIn2O4…等)或類似的絕緣膜。而本研究是使用Cu做為功能層，CeO2¬-Al2O3做為介質層。 本研究主要是利用磁控濺鍍系統成長出CeO2-Al2O3 / Cu / CeO2-Al2O3薄膜後，探討CeO2-Al2O3是否具有作為介質層的功能，另外就是探討各膜層在不同的厚度、不同工作溫度及不同退火溫度所表現出來的光學特性是否具有低輻射鍍膜玻璃的水準，因此必須利用薄膜分析檢測的設備來檢測，其檢測項目包括使用α-step測量膜厚，使用UV/VIS/NIR 分光光譜儀量測可見光和近紅外光的穿透率與反射率，使用FTIR量測遠紅外光的反射率來換算遮蔽係數，使用XRD量測晶體結構和某些結晶性質，以百格測試來測試薄膜的附著力…等。 藉由以上的測試，得知CeO2¬-Al2O3確實提升穿透率和增強薄膜間的附著力，具備了介質層的特性。在400℃的工作溫度下的所濺鍍出薄膜的光學表現，除了符合我國玻璃綠建材之評估基準表的可見光穿透率≧50和可見光反射率≦20的標準之外，也最不會受到溫度的改變而影響其光學表現。
並列摘要
Low emissivity (Low-E) coated glass can reflect most infrared rays and ultraviolet rays, meanwhile, have a higher transmission rate to the visible light, too. The film of Low-E glass is three layers basically, dielectric layer / function layer / dielectric layer, generally function layer on the market all select the metal like silver (Ag) , copper (Cu) , aluminium (Al) etc. to be made for function layer. And the main function of the dielectric film is to increase the transmisttance of the visible light, there is another function of regulating the film's color . Generally we select for use dielectric layer is metal to oxidize film (TiO2, SnO2, ZnO, CdO, In2O, Cd2SnO4, CdIn2O4 ,etc.) or similar insulating film, and this research is to use CeO2 -Al2O3 to be made for the dielectric layer. This research to utilize reactive magnetron sputtering to grow up the CeO2-Al2O3 / Cu / CeO2-Al2O3 film mainly, and probe for CeO2-Al2O3 has a function on dielectric layer. In addition to probe the optics characteristic for every film in different thickness, different working temperature and different annealing temperature show has a characteristic of low emissivity (Low-E) coated glass. So, we must utilize some equipment to analyse the film, it measures the items including using α-step to measures the thickness of the film, use UV/VIS/NIR spectrophotometer to measure the transmittance and the reflectance of visible light and close infrared light for different thickness of film, use FTIR to measure the absorptivity and reflectance of far infrared for different thickness of film, use XRD to determine crystal structure and some character for crystallization…etc. With the test of the above finally, we judge the film of CeO2-Al2O3 really increase transmittance and adhesion, it has accord with the characteristic of dielectric layer. Beside, the characteristic of optical made in 400℃ accord with the basic appraisal of the green building materials of glass in our country transmittance of visible light ≧50 and reflectance of visible light ≦20 standards , and also can't be effect on the characteristic of optical by change temperature.