- 學位論文
低成本白光干涉儀之垂直掃描系統
Low Cost Vertical-scanning System for White Light Interferometer
摘要
高精度白光干涉儀之掃描系統一般都使用PZT做位移裝置，因受限於行程短以及定位速度慢等因素，使得量測系統效率降低，故本研究以提高量測機台效能以及降低設備成本為研究方向，係利用微處理器為垂直移動系統之控制核心，並選購相較於PZT與回授控制器成本較低之步進馬達，做為垂直移動之位移裝置。在提升系統取像效能上，則是使用另一個微處理器做為擷取影像之控制核心，擷取馬達控制訊號，在平台位移不停止之條件下，同步觸發CCD Camera截取影像。 本研究之低成本垂直掃描系統，其移動平台行程為20mm，全步分解能為20nm可進行長景深的垂直掃描量測，硬體成本較傳統PZT可減少33%，並支援CCD Camera 最大取樣率為1000 FPS。
並列摘要
PZT is generally used in the scanning system of white light interferometer, but it takes time to reach the exact position as it uses precise movement feedback control. During vertical scanning the CCD camera needs to wait for PZT to be steady and capture the image. This phenomenon limits the Frame per second (FPS) of CCD and makes the time of metrology too long. The aim of this research is to develop a high speed and low cost vertical scanning system for white light interferometer. To reduce the cost of the system, stepping motor controlled by microcontroller used in the developed design for vertical movement. Another microcontroller is used to pick up the signal from the driver circuit of stepping motor and trigger the CCD camera to capture the image. This increase the FPS of CCD camera as the motor can run continually. The resolution and total scan distance of system are determined to be 20nm and 20mm respectively. The developed design can reduce the cost by 33% and increases the CCD camera sampling rate to 1000 FPS.