反應磁控濺鍍陶瓷-金屬薄膜之光學特性研究

The Optical Properties of Cermet Thin Films Deposited by Reactive Magnetron Sputtering

葉詠津(Yung-Chin Yeh)

指導教授 ： 鍾財王

中原大學/工學院/化學工程學系/碩士(2008年)

https://doi.org/10.6840/cycu200800421

摘要

本論文以反應性磁控濺鍍製備不鏽鋼/氮化不鏽鋼(SS/SS-N) 、鋁/氮化鋁(Al/AlN)陶金薄膜並探討其光學特性。在薄膜的試製中改變濺鍍功率、濺鍍時間、氮氣流率，探討每個參數對薄膜的影響，找到最佳鍍製陶金薄膜的參數，SS/SS-N陶金薄膜是在濺鍍功率150W下，改變氮氣流率2.5-50%濺鍍20分鐘。Al/AlN陶金薄膜是在濺鍍功率150W下，改變氮氣流率3-12%濺鍍10分鐘，成功製備一系列不同金屬分率之SS/SS-N和Al/AlN陶金薄膜。光學特性分析儀器為分光光譜儀及橢圓儀，利用橢圓儀中內建之有效介質理論(EMA)及振盪模型(Oscillator)，針對不同特性陶金薄膜之光學常數建立適當之振盪模型擬和，在高金屬分率之薄膜以Drude oscillator 和Lorentz oscillator描述，在低金屬分率或無金屬成份之薄膜以Tauc-Lorentz oscillator和Cauchy進行擬和，都得到非常好的分析結果。實驗中也選用Oscillator和EMA兩種不同模型模擬Al/AlN陶金薄膜之光學常數，也得到相當吻合的結果。根據橢圓儀分析結果進行多層選擇性吸收膜之設計，單不鏽鋼靶及單鋁靶製備之選擇性吸收膜皆具有高性能其吸收率>0.9及放射率<0.1，並且得到之實驗結果與模擬結果也相當一致。

關鍵字

陶金薄膜 ； 光學特性 ； 氮化不鏽鋼 ； 氮化鋁 ； 橢圓儀

並列摘要

The objective of this research was to study the optical properties of stainless steel/nitride stainless steel (SS/SS-N) and aluminum/nitride aluminum (Al/AlN) cermet thin films deposited by reactive magnetron sputtering. In order to find the optimal sputtering conditions for SS/SS-N and Al/AlN cermet thin films we changed the sputtering power, sputtering time and nitrogen flow ratio to study the effect of each parameter. We have successfully prepared a series of SS/SS-N and Al/AlN cermet thin films with different metal volume fractions (MVF): a) sputtered SS/SS-N cermet thin films under sputtering power of 150 W, sputtering pressure 3 mtorr, sputtering time of 20 min and at different nitrogen flow ratios from 2.5% to 50%; and b) sputtered Al/AlN cermet thin films under sputtering power of 150 W, sputtering pressure 2 mtorr, sputtering time of 10 min and at different nitrogen flow ratios from 3% to 12%. The optical properties of the cermet thin films were studied by UV/VIS spectrophotometer and spectroscopic ellipsometry (SE). The variations in optical properties of the different MVF cermet thin films have been evaluated from SE data using the effective medium approximation (EMA) and oscillator models. We used the Drude oscillator and Lorentz oscillator models for the high MVF cermet thin films, and the Tauc-Lorentz oscillator and Cauchy models for the lower MVF cermet thin films and also for the no-metal content thin films. We obtained very good analysis results. We also compared the analysis results of Al/AlN cermet thin films which were evaluated by both EMA and oscillator models and also get very similar results. We have used the optical constants (n and k) obtained by SE to design a multilayer selective absorber thin film and the experimental result agreed well with the theoretical prediction. The stainless steel and aluminum materials are used in one-target sputtering to prepare solar selective absorber films having good performance with solar absorptance > 0.9 and thermal emittance < 0.1.

並列關鍵字

Cermet thin film ； Nitride aluminum ； Nitride stainless steel ； Optical properties ； Spectroscopic ellipsometry

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