電泳沈積法製備鈦酸鋇/鈦酸鍶鋇薄膜及其特性研究

Synthesis and Properties of Barium Titanate & Barium Strotium Titanate Thin Films via Electrophorectic Deposition Method

鄭佩琪(Pei-Chi Cheng)

指導教授 ： 王宏文

中原大學/理學院/化學研究所/碩士(2007年)

https://doi.org/10.6840/cycu200700421

摘要

鈦酸鋇/鈦酸鍶鋇為高介電常數的陶瓷粉體，由於其有相當高的介電常數及容積效率、低的逸散因子，適用於中低的工作電壓，因此被廣泛應用於製備多層陶瓷電容器中。
微波水熱法結合微波加熱與水熱法，與常規水熱法相比，具有更快到達反應溫度，縮短反應時間，製備出結晶完全的粉體，對於製備奈米粒子而言可以有效的節省能量及時間。本研究藉由控制其反應溫度、反應時間，探討粒子結晶情況、及粒子大小。
電泳沈積法為液相鍍膜技術的一種，其原理是在一外加電壓下，驅動懸浮溶液中帶電粒子往與本身所帶電荷相反之電極移動，並沈積於基板上。本研究利用分散於溶劑中的奈米鈦酸鋇/鈦酸鍶鋇粒子，在一外加電壓驅動下，於陰極基板上形成一均勻之薄膜。藉由溶劑的選擇、改變外加電壓、沈積時間，研究薄膜之沈積速率，微結構變化及薄膜之介電特性。
近幾年來奈米核-殼結構的研究引起科學界廣泛的興趣及討論，因為核-殼結構粒子具許多特殊電、磁、光學及觸媒性質，所以我們將對核殼結構奈米線的製程及性質做探討。藉由模板法輔助成長奈米線與奈米管，形成核-殼結構奈米線陣列電容器。本研究利用高分子模板及氧化鋁模板，再分別就核與殼形成的先後順序，探討形成核-殼結構的表面形態及其介電特性。

關鍵字

電容器 ； 電泳沈積 ； 鈦酸鋇 ； 鈦酸鍶鋇

並列摘要

Barium titanate and barium strotium titanate are the high dielectric constant ceramics with high volumetric efficiency and low dissipation factor. They are sutiable materials for Multilayer Ceramic Capacitors (MLCC).
The major merit of microwave hydrothermal over conventional hydrothermal process is the rapid heating to desired temperature and enhanced crystallization, which save energy and time for synthesis. In this work, the effects of various reaction parameters such as reaction temperature, and reaction time on the crystal size of nanocrystals are discussed.
Electrophoretic deposition (EPD) was achieved via a forced motion of charged particles under an applied voltage towards an electrode with opposite charge, and then the particles coagulate to form a deposit on the substrate. In this work, positively charged baruim titanate and barium strotium titanate nanoparticles were dispersed in the selected solvents and then electrophoretically deposited to form uniform films on the cathodic electrode under an applied voltage. This research focuses on the effect of electrophoretic parameters, such as solvents, applied voltages, and deposition time, on the deposition rate, and film characteristics. Finally, some works about the dielectric characters on the barium strotium titanate thin films using the EPD process is also carried out.
Researchers have been focused on nano-sized core-shell nanorods structure due to their special electro-magnetic properties, optical characteristics and catalytic properties. The preliminary study of dielectric properties of the BST-Au core-shell nanorod demonstrates that the core-shell nanorod array capacitor were a feasible nanostructure for high capacitance.

並列關鍵字

Barium Titanate ； Barium Strotium Titanate ； electrophoretic deposition ； capacitance

參考文獻

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