- 學位論文
以常壓式有機金屬化學氣相沉積法成長氧化鋁薄膜製成背面鈍化太陽能電池改善多晶矽太陽能電池效率
Improving the Efficiency of Multicrystalline Silicon Solar Cells by using AP-MOCVD Grown Al2O3 Thin Films for Rear Surface Passivation Solar Celll
摘要
以常壓式有機金屬化學氣相沉積法成長氧化鋁薄膜製成背面鈍化太陽能電池改善多晶矽太陽能電池效率 中文摘要 近年環保意識抬頭，各項綠能產業正逐漸的發展。發展已久的晶體矽太陽能電池主流市場以單晶矽及鑄造多晶矽為主。而鑄造多晶矽由於製作成本較單晶矽低廉，固市場佔有率略優於單晶矽且逐年增加中。但由於鑄造多晶矽中還有大量的晶界與差排等許多缺陷，固在轉換效率上一直略低於單晶矽太陽能電池。 本論文所探討的即是利用常壓式有機金屬化學氣相沉積法（AP-MOCVD）沉積氧化鋁薄膜在鑄造多晶矽背面形成一層鈍化層，減少多晶矽表面懸鍵降低表面複合速率。此項步驟可以提升少數載子生命週期，切在太陽能電池的轉換效率上也可有效提升。 本實驗中利用微波反射光導衰變(Microwave-Reflection Photo-Conductance- Decay)技術量測少數載子生命週期。我們發現沉積氧化鋁薄膜再經回火後，相較於未沉積的多晶矽基板，少數載子生命週期可由20.5μs提升至44.7μs。經過傳統太陽能電池製作過程轉換效率也可以改善2%左右。 關鍵字：氧化鋁、矽太陽能電池、載子生命週期、鑄造多晶矽
並列摘要
Improving the efficiency of multicrystalline silicon solar cells by using AP-MOCVD grown Al2O3 thin films for rear surface passivation solar cell Abstract In recent years, environmental awareness, the green energy industry is gradually developing. The development of long crystalline silicon solar cell to the mainstream market-based single-crystal silicon and multicrystalline silicon foundry. The casting multisilicon as compared with low production cost, solid market share slightly better than the single crystal silicon and on the rise. However, there are a lot of cast multicrystalline silicon grain boundaries and dislocations, and many other defects, has been solid in the conversion efficiency slightly lower than the single-crystal silicon solar cells. The thesis is that the use of atmospheric pressure metalorganic chemical vapor deposition (AP-MOCVD) deposition of aluminum oxide film on the back of the casting form a passivation layer of multisilicon, multisilicon surface dangling bonds to reduce the surface recombination velocity decreased. This step can improve the minority carrier lifetime, cut in the conversion efficiency of solar cells can be effectively improved. In this study, the use of Microwave-Reflection Photo-Conductance-Decay technique measuring minority carrier lifetime.We found that deposition of alumina film via annealing, compared with no deposition of multicrystalline silicon substrate, minority carrier lifetime can be increased from 20.5μs to 44.7μs. After a conventional solar cell conversion efficiency of the production process can be improved about 2%. keyword：Al2O3,silicon solar cell, lifetime, mc-Si.