雷射3D列印技術應用於微/奈米複合結構

本論文以人工的方式來製作出具有微米結構和微/奈米複合結構的模具，製程方式由3D列印技術和雷射干涉微影技術所製作。先藉由電腦輔助軟體(AutoCAD)繪製出圖形，再利用設計的3D列印機製作出微米方柱結構，即為完成微米方柱結構。然後再塗佈光阻在其微米結構上，並進行旋塗，接著利用雷射干涉微影技術，採用雙光束來進行干涉，來製作出複合結構的效果。緊接著透過模版轉印將製作出來的樹脂模具複製來得到相反結構的PDMS軟性模具，最後將化學氧化聚合而成的聚苯胺溶液滴在PDMS模具上，經過烘烤後就會得到具有微米結構以及微/奈米複合結構的聚苯胺薄膜，並且應用在超級電容上。利用掃描式電子顯微鏡(SEM)來進行薄膜上結構的檢測，來確認所製作的微/奈米結構是否成功複製在聚苯胺薄膜上。而電化學檢測則是將聚苯胺薄膜放置在電極上，利用電化學檢測儀器進行檢測，證明了增加表面積的聚苯胺薄膜，其比電容值也提升了。在1 A/g的電流密度下，無結構和微/奈米複合結構的比電容值分別為304 F/g 和 487 F/g，比電容值提升了約60 %。

關鍵字

雷射； 3D列印；複合結構

並列摘要

This thesis proposed a method to create molds with hierarchical micro/nano structures to enable the imprinting of conductive polymer polyaniline (PANI) for use as an electrode.The microstructure of mold was made by 3D printing. Computer-aided software (AutoCAD) was used to draw square column structures with micrometer size, and self-made 3D printer was used to fabricate micro-columns. Then the laser interference lithography was employed to build nanostructure on the surface of the micro-columns to form hierarchical micro/nano structures. Polydimethylsiloxane (PDMS) was used as a soft mold to duplicate the pattern of the previous hard mold. At last, PANI solution was poured into PDMS mold, then heat up to fabricate PANI solidified film applied in the supercapacitor. Using field emission scanning electron microscope (FE-SEM) confirmed that the surface structure of the film identification. On a three-electrode electrochemical cell, experiments were performed to characterize the electrochemical properties of plane PANI and PANI with microstructure and hierarchical microstructure, respectively. Cyclic voltammetric (CV), galvanostatic charge–discharge, and electrochemical impedance spectroscopy (EIS) measurements were then conducted using 1M H2SO4 as an electrolytic solution. Experimental results demonstrated that its specific capacity was 487 F/g, which is higher approximately 60% compared with PANI plane film. Increasing the surface area of PANI through the inclusion of hierarchical structures enhanced oxidation/reduction reactions, leading to a higher average specific capacitance.

並列關鍵字

Laser ； 3D printer ； Composite structure

參考文獻

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國際替代計量

雷射3D列印技術應用於微/奈米複合結構

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