- 學位論文
6吋晶圓代工廠電力諧波探討與分析
Investigation and Analysis of Harmonics in a Wafer Foundry
摘要
電力品質對於高科技產業精密工廠的生產有極大的影響，近年來電力電子設備使用率快速增加，且電力電子設備多為非線性負載，而電力系統上的諧波污染成分主要即由此類負載造成，又由於電力系統上的諧波污染會導致電壓波形畸變，造成機器設備無法正常運轉，因此電力系統之諧波污染抑制已是不容忽視的課題。 本文將針對諧波定義、來源、影響範圍及諧波改善方法作初步介紹，再搭配電力品質分析儀，實際量測各主要負載配電盤，利用實測得知之諧波電流，透過EDSA軟體加以模擬分析，分析之結果可提供工廠之電力系統操作及維護人員推算出配電系統中可能發生之諧波問題點，進而採取預防措施，避免電力諧波造成系統危害，防止事故之發生。 為改善電力品質，本文將比較被動式濾波器投入於高低壓匯流排後，以及系統參數變化時，對系統諧波之影響，並作完整之差異點比較。另外，利用軟體內建之濾波器自動設計功能，搭配手動計算模式，藉以比較軟體所設計之濾波器與手動計算之濾波器差異點與改善能力。
並列摘要
Power quality has great influence on high tech and precision industries. The power system is often polluted by harmonics. And harmonics are produced from non-linear load. These non-linear load pollutions usually cause voltage distortions that lead to equipment malfunction. Most of electronic equipments belong to this kind of loads. Hence, control of harmonics becomes an essential subject for rapid increasing electronic equipments in recent years. In this thesis, the definition of harmonic, sources, impact and improvements were provided. Measurement of the major load of each power panels was conducted by using the analyzer of power quality. The measured harmonic current data to EDSA were used for simulation. The simulation results could give the technicians and maintainers for reference in the power system where the harmonics could happen. Therefore, they could prevent the power system from damage and accidents. To study the quality of electric power, we will compare the harmonic effects by varying different parameters in the system with the passive filters at high and low voltage buses. Moreover, the differences and design capability between built-in filter design in EDSA and manual solution for the filter design were compared.