二維奈米級微動平台自調式模糊PID控制器之研究

Design of a Self-tuning Fuzzy PID Controller for a Two Dimensional Nanoscale Platform

林雅琪(Ya-Qi Lin)

指導教授 ： 范憶華

中原大學/工學院/機械工程研究所/碩士(2016年)

https://doi.org/10.6840/cycu201600038

摘要

現今工業發展趨向微型工業，為了達到精密加工，平台設備之定位及其控制精度之優劣極為重要，目前大多數移動平台都以螺桿與馬達搭配結合作為驅動方式，依據馬達與螺桿之精度來計算平台之微動位移量，然而平台在微量移動上會因螺桿與馬達控制之影響造成位置誤差，例如:控制器飽和現象會造成系統的穩態誤差及機構的跳躍振動等外部干擾，因此造成目前平台定位精度約為一微米。本文設計一套高精度微型移動平台，利用馬達搭配螺桿驅動微型移動平台，微型移動平台是利用縮放儀原理，將一般螺桿之移動量依比例縮小，不僅能夠降低成本也可減少誤差，並達到高精密度的效果。在微型平台的控制上，利用傳統PID控制器結合模糊理論進行平台控制，達到較佳的控制效果，並搭配光學尺所擷取之微動平台之位移訊號進行回授，以達到較好的定位及路徑控制。

關鍵字

微動平台 ； 縮放儀 ； 模糊PID控制器

並列摘要

A Fuzzy-PID controller was proposed design in this paper for a nanoscale platform positioning system. The target nanoscale X-Y platform is mounted on a pantograph mechanism and restricts the rotation by two small sliders , and is driven by a traditional X-Y platform with common precision. The goal of this study is to drive the target platform to move in the region of 20mm  20mm for the positioning, and repeatedly positioning accuracy error is less than 800 nm by the traditional X-Y platform. Due to the different PID parameters will affect platform positioning accuracy and system response for the two axes, the Fuzzy-PID controller were training to fit the mechanism to promote the positioning precision and path control effect. The simulation and experimental results indicated that the proposed method is feasible for the nano-scale micro-platform positioning.

並列關鍵字

Fuzzy-PID Controller ； Pantograph Mechanism ； Nanoscale X-Y Platform

參考文獻

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