以線上採樣系統監測環境中揮發性有機污染物

Monitoring Volatile Organic Compounds (VOCs) with On-line Sampling Analysis Systems

譚文豪(Wen-Hao Tan)

指導教授 ： 葉華光

中原大學/理學院/化學研究所/碩士(2009年)

https://doi.org/10.6840/cycu200901087

摘要

在今日台灣工業蓬勃發展，更以高科技的半導體晶圓廠與LCD面板廠作為台灣邁向世界的推動力，背後對於環境與工作場所所造成的污染，伴隨著這些工業的發展速度與其重要性的增加也越來越受到關注。環境中揮發性有機污染物(Volatile Organic Compounds, VOCs)不僅僅對於排放出廠區外的環境會有所影響，於傳統產業中面對使用特用化學品的比例越來越高，半導體製程中在面臨製程精細化，而對應的物料純度、製程設備、潔淨室的污染影響也漸漸得備受關注與探討。
目前對於VOCs等各種檢測方式依舊還是採用離線採樣模式，透過各式各樣的採樣裝備，將現場環境空氣樣品帶回實驗室內進行逐一分析。這樣的採樣模式相當的耗費大量的人力、物力資源，樣品若保存不當，就有可能面臨無法還原現場所採之空氣樣品。
將現行離線式的採樣技術與分析技術提昇至線上即時採樣分析，配合技術成熟的氣體樣品濃縮採樣系統與氣相層析質譜儀分析技術，透過實驗中所得到的數據比較，在測試的標準品中Online TDS-GC-MSD線性可達到R2>0.95，而實際環境測試中，也可以透過GC-MSD的特性達到未知物種的解析，進而提昇對於環境周界的品質瞭解。透過可全天候自動採樣、分析的線上分析技術；以進而節省大量分析人力，亦可達到進行全天候作業環境或廠區周界空氣中有機污染物監測，搭配監測環境的異常狀況更可找出相關污染問題來源。

關鍵字

揮發性有機污染物 ； 熱脫附

並列摘要

Nowadays the manufacturing industries in Taiwan are vigorously flourishing, especially for high technology of semiconductor wafer and LCD panel manufacturers, which are the key drivers to lead Taiwan moving toward the world. However, with the speed of industrial development and the increase of its importance, the pollutions caused to environment and workplaces are also attracting more and more attention. The Volatile Organic Compounds (VOCs) not only have impacts on the external environment after discharge out from manufactories but also affects the contamination on material pureness, manufacturing equipments, and clean room, in view that the ratio of adopting specific chemicals in tradition industry is getting higher and the manufacturing process of semiconductor industry is requiring more and more preciseness.

At present the detection methods of VOCs are still adopting Offline sampling model. Through various sampling devices, the analysis are executed by taking environment air sample back to laboratory. Such sampling model requires to consume huge manpower and material resources. Moreover, once the conservation of the samples is inappropriate, the air samples may not be able to be restored.

By elevating current offline sampling and analysis skill to online real-time sampling analysis , and collaborating with mature gas sample pre-concentrated system (TD system) and GC-MS, via the comparison with the output data from experiments, the online TDS-GC-MSD from testing sample can achieve R2>0.95. In Real environment test, the understanding to the quality of environment can be uplifted as well through the feature of GC-MSD and thus the analysis of unknown kinds with 24 hours Online auto-sampling and online analysis skill, it can further save extensive manpower and also accomplish the goals of 24 hours VOCs monitoring in the air of operation environment or manufactory surroundings.

並列關鍵字

Thermal Desorption ； VOC

參考文獻

1、揮發性有機物空氣污染管制及排放標準(環保署空字第0940070805號令)。

2、半導體製造業空氣污染管制及排放標準(環保署空字第0910069403J號令)。

12、光電材料及元件製造業空氣污染管制及排放標準，環保署空字第0950000717號令。

8、危險物與有害物標示及通識規則，行政院勞工安全委員會勞安字第0960145703號令。

14、Ruthann A Rudel, David E Camann, John D Spengler, Leo R Kornm, and Julia G Brody; "Phthalates, Alkyphenols, Pesticides, Polybrominated Diphenyl Ethers, and other Endocrine-Disrupting Compounds in Indoor Air and Dust", Environment Science & Technology Vol. 37, p4543-4553.