本研究使用非晶質微型磁通匝感測器於不同磁芯彎曲應力及複合式結構進行其磁特性之研究。其應用材料為日本日立金屬(Hitachi Metal, Japan)所製造之三種不同鐵基非晶質合金,其合金材料為SA1、HB1及HB1-M製作成磁芯厚度約為0.0254 mm 30片。首先,藉由有限元素法(FEA)進行磁通匝磁感測器之3D建模,分析磁芯內部之磁通密度分佈及磁芯損耗。再者,依模型製造出非晶質磁芯並施以退火溫度介於325℃至350℃且恆溫一個小時直流電流磁場強度800A/m,以得到較佳磁向異性之特性。於實驗中由外加交流訊號且頻率介於0.5k~3kHz之間產生磁芯激磁現象,進行其磁滯曲線、激磁功率與磁芯損失之特性量測,另外,透過快速傅立葉轉換(FFT)觀察磁芯振動之表現,實驗結果顯示,磁通匝感測器運作於3kHz高頻之靈敏度表現較好。本研究亦提出磁芯角彎曲應力以三角型態磁芯相較其他類別型態磁芯較佳,另外,於複合型態磁芯結構於較高導磁率合金置於磁芯外層將有較佳磁感特性。
This dissertation investigates the effect of different core bending stress and composite-cored structures of magnetic properties on micro-fluxgate sensor with amorphous materials. Three types of amorphous alloys, including SA1, HB1 and HB1-M, are fabricated by HITACHI Metal Co. Japan, which is applicable into core thickness with 0.0254 mm 30 piece. Firstly, in order to analyze the core inner magnetic flux density distribution and magnetic loss, 3D simulation structure for fluxgate sensor was constructed by using finite element analysis method (FEA). Secondly, it is necessary to generate better magnetic anisotropy performance for amorphous core due to the core was annealed during 325 ℃ to 350 ℃ soak for 1hour and conducting at DC current to generate magnetic field density 800A/m. According to the experimental results, the measured characteristics of hysteresis loop, exciting power and magnetic loss under alternate current signal during 0.5k~3kHz, can be obtained. Thirdly, Fast Fourier Transformation (FFT) can be used to observer the magnetic core vibration. A better sensitivity property for magnetic fluxgate sensor operated at 3kHz, can be obtained. This study was proposed better magnetic properties for triangle forming core in bending stress than that counterpart of others cores. Finally, it is indicated that a better magnetic sensor performance for composite-cored structure with high magnetic induction, can be obtained.