可撓式溶液製程石墨烯/薄型矽異質接面光感測器

Solution-Processed Flexible Graphene/Thin Silicon Heterojunction Photodetectors

方麒鈞(Chi-Chun Fang)

指導教授 ： 涂維珍

中原大學/電機資訊學院/電子工程研究所/碩士(2018年)

https://doi.org/10.6840/cycu201800731

摘要

石墨烯在近年已經開始被廣泛研究及使用於光電元件上，石墨烯具有低電阻率、高導熱係數、高電子遷移率、高透明度，且兼具高硬度及高韌性，富有可撓性，以及優異的光學性質，這些性質用在石墨烯/矽異質接面光感測器上也有很良好的表現。
在本論文中使用溶液製程法來製作可撓式石墨烯/薄型矽異質接面光感測器取代以往繁瑣的製作過程，不須昂貴的儀器也不須在真空環境中進行元件製作，使用旋轉塗佈來將石墨烯附著於矽基板上形成異質接面，除此之外，基板使用的矽基板經過蝕刻薄化因此具有可撓性。
元件製作完成的元件進行表面分析、拉曼測量及使用雷射光照射元件，分析其工作狀況，結果在有無照光下，光電流相比暗電流有明顯的增加，改變雷射照光強度，光電流也會隨之增減，而且元件在開關燈情況下也擁有良好的光響應。
在實驗中我們僅使用了石墨烯、奈米銀線、矽基板等主要材料，並且以旋轉塗佈機在短時間內完成可撓式石墨烯/薄型矽異質接面光感測器，未來有機會發展成量產型低成本可撓式光電元件。

關鍵字

石墨烯 ； 光感測器 ； 溶液製程 ； 可撓式 ； 薄型矽

並列摘要

Graphene has been widely studied and used in photodetectors in recent years. Graphene has low electrical resistivity, high thermal conductivity, high electron mobility, high transparency, high hardness, high toughness, flexibility and excellent optical properties, as a result, graphene has great potential in optoelectronic devices.
In this paper, solution-processed flexible graphene/thin-silicon heterojunction junction photodetectors were constructed, which can replace the complicated fabrication process with the use of expensive equipment and vacuum environment.
We perform several analyses on the flexible samples, including Raman spectra, current-voltage (I-V) curves, power dependent current and so on. The photocurrent is obviously increased under the light illumination compared with the dark current in the dark.
In this experiment, we use only graphene and silicon substrate as the main materials to produce flexible graphene/thin-silicon heterojunction junction photodetectors. In the future, it would be developed into mass production, low-cost and flexible photodetectors

並列關鍵字

Solution-Processed ； Flexible Photodetector ； Thin-Silicon

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