在氧化鋅奈米柱陣列上濺鍍不同形貌奈米氧化物
之多重材料分析以及光/氣體雙重感測的應用

本研究中探討不同氧化物金屬薄膜氧化鋅奈米柱對於各種環境下的光及氣體雙重感測，首先清洗二氧化矽基板後，利用旋塗法(Spin coating)在基板上生成一氧化鋅晶種層，透過最後的水熱法得出所要的氧化鋅奈米柱，再利用射頻磁控濺鍍機(Radio Frequency Sputter)在氧化鋅奈米柱上生成不同氧化金屬薄膜層，例如: MgO是常用的醫療用樣品、水淨化、催化，且無臭、無味、無毒，鎢元素具有極高穩定性，在所有元素中擁有第二高的熔點，而氧化鎢在環境檢測和安全監測方面有著廣泛的應用。V2O5則是在光催化、電致變色及氣體感測上有些應用，而從不同的金屬濺鍍在氧化鋅奈米柱上可以改變其光靈敏度、氣體靈敏度，及探討在不同氣體、溫度、光源、濺鍍時間下氧化鋅奈米柱的響應曲線及反應時間。材料表面分析從掃描電子顯微鏡(SEM)與穿透式電子顯微鏡(TEM)中，ZnO/WO3形成火柴投結構;ZnO/V2O5形成膠囊結構;ZnO/MgO則是一點點的附著在表面，通過HRTEM觀察到氧化鋅奈米柱表面外圍金屬薄膜是非晶的，接著再使用X-射線繞射分析(XRD)全部的氧化物金屬層，證明濺鍍上去的氧化物金屬薄膜都是非晶結構。實驗結果顯示氧化鎢因為其厚度太厚導致光/氣體響應度下降，而氧化鎂及五氧化二釩因濺鍍速率較慢使得其厚度較薄，使氧化鋅奈米柱與其異質結構獲得許多的缺陷，改善其光/氣體感測。

關鍵字

氧化鋅奈米柱；濺鍍製程；光感測器；氣體感測器；缺陷

並列摘要

In this study, ZnO nanorods with different nano-oxide metal caps were investigated for light/gas dual sensing properties in various environments. First, after we cleaning the silicon dioxide substrate, a ZnO seed layer was formed on the substrate by spin-coating. Then,the desired ZnO nanorod arrays were obtained by hydrothermal methods. After the growth of ZnO nanorod arrays, a radio frequency (RF) sputter was used to shape different nano-metal oxide caps on top of ZnO nanorods. Among various metal oxides, MgO, an odorless, tasteless, and non-toxic compound, is commonly used for medical treatments, water purification, and catalysis. Next, WO3 can be used in environmental testing and safety monitoring. V2O5 has wide range of applications, especially in photocatalysis, electrochromic, and gas sensing. Based on our experimental results, both light/gas sensitivity of ZnO nanorods can be improved by various metal nano-oxide caps. Furthermore, the sensing behaviors of ZnO nanorods incorporating nano-oxide caps in different gas ambients, temperatures, light sources, and sputtering times can be analyzed. In addition to sensing measurements, surface morphology analyses in SEM and TEM were studied. Results indicate that ZnO/WO3 forms a match head structure; ZnO/IGZO forms a capsule structure; ZnO/MgO is randomly attached to the ZnO nanorod’s surface. Furthermore, all these metal nano-oxide caps including MgO, V2O5, and WO3 were observed to be amorphous structure either through HRTEM images or in XRD patterns. The metal thin film on the periphery of the surface of the m-pillar is an amorphous structure. Moreover, WO3 caps were too thick so that the light/gas dual sensitivity were worsened while V2O5 and MgO caps with appropriate thickness can enhance the dual sensitivity on ZnO-based dual sensors owing to the interface defects.

並列關鍵字

ZnO nanorods ； sputtering process ； photo sensor ； gas sensor ； defect

參考文獻

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