定向刷膜/離子束轟擊之聚醯亞胺/類鑽碳液晶配向膜之研究

Surface Alignments of Polyimide and Diamond-Like Carbon with Rubbing and Ion Beam Bombardment

蕭惠方(Hsiao-Hui Fang)

指導教授 ： 洪偉修 ； 許瑤真

國立臺灣師範大學/理學院/化學系/博士(2005年)

摘要

本論文是利用同步輻射X光微結構吸收光譜與紅外線反射吸收光譜量測，研究聚醯亞胺薄膜在不同壓入量的定向刷膜處理後，其化學組成和表面分子的配向性的變化，瞭解聚醯亞胺結構形狀（主鏈和側鏈分子）與表面分子的配向性的關係。具主鏈結構的聚醯亞胺其平面配向性較佳，而側鏈結構垂直平面的配向性佳。隨著定向刷膜的壓入量增加，配向性的比例值增加。

在類鑽碳的表面配向性研究，是將其暴露於氫離子束與氬離子束中，利用 X 光微結構吸收光譜和 X 光光電子能譜研究在類鑽碳表面經過離子束轟擊化學鍵的產生的破壞情形，以期了解類鑽碳所產生之化學組成變化與化學鍵結異向結構規則性。類鑽碳表面經氫離子轟擊後比氬離子轟擊後具有更明顯的配向性，而 sp3-rich 類鑽碳比 sp2-rich類鑽碳有較佳的配向性，表示類鑽碳樣品中的芳香環的平面和離子束入射方向平行。

比較離子束轟擊與定向刷膜的配向處理方法，定向刷膜方式對聚醯亞胺的配向效果比離子束轟擊的效果較佳；對類鑽碳而言，離子束轟擊的配向效果比定向刷膜方式的效果較佳。

關鍵字

聚醯亞胺 ； 類鑽碳

並列摘要

The near-edge X-ray absorption fine structure (NEXAFS) and polarized reflection-absorption infrared spectroscopy (RAIRS) measurements are utilized to investigate the chemical composition and orientation structure of the surface molecules on the polyimide (PI) film treated with different rubbing forces. The in-plane orientation for the PI film with the long chain molecular structure is better than the PI film with the branched structure. In contrast, the latter film can form a better aligned out-of-plane surface than the former film. On the base on the NEXAFS data, it is concluded that the dichroic ratio increases with the increase of rubbing strength. The alignment effect of rubbing is better than ion beam bombardment for the PI samples.

We have also studied the effects of hydrogen and argon ion beams on the surface of the diamond-like carbon（DLC）film. The data of NEXAFS and X-ray Photoemission Spectroscopy（XPS）are used to investigate the configuration alignment of chemical bond on the DLC surfaces. The sp3-rich DLC sample exhibits a better surface-aligned characteristics after the bombardment treatment of H+ ions than Ar+ ions. The plane of the aromatic ring is preferentially orientated to parallel to the direction of the incident ion beam. The orientation effect of ion beam bombardment is better than rubbing for DLC, whereas the orientation effect of rubbing is better than ion beam bombardment for polyimide.

並列關鍵字

polyimide ； Diamond-Like Carbon