皮秒雷射製備二氧化鈦的特性及光催化性能之研究

Characteristics and Photocatalytic Performance of Titanium Dioxide Prepared by Picosecond laser

黃翌瑋(Huang Yi-Wei)

指導教授 ： 鄧敦建 ； 鄭慶民

國立臺灣師範大學/科技與工程學院/機電工程學系/碩士(2022年)

https://doi.org/10.6345/NTNU202201341

摘要

本論文提出一種利用皮秒雷射製備黑色二氧化鈦(Black Titanium Oxide)的方法，使用綠光皮秒雷射在鈦金屬基板製備黑色二氧化鈦。通過調整雷射功率及改變掃描速度、掃描間距、雷射焦距、雷射頻率、加工環境，獲取黑色二氧化鈦中擁有不同比例金紅石(rutile)與銳鈦礦(anatase)。對於製備完成材料的表面形貌與結晶型態使用掃描電子顯微鏡(SEM)、X光繞射儀(XRD)、拉曼光譜儀進行測量與分析。最後通過上述測量與分析結果搭配亞甲基藍(MB)光催化降解實驗挑選出最佳的皮秒雷射製程參數，目的為探討本製程所製備的黑色二氧化鈦在光觸媒清潔領域應用的可能性。研究結果顯示，試片表面因為不同的雷射參數呈現出不同形貌的表面，且透過EDS量測結果顯示試片存在氧空缺的TiO2-x。XRD及拉曼光譜量測發現黑色二氧化鈦材料成分含有anatase、rutile、Ti2O3、TiO2-x，並且發現在富含氧的雷射加工環境中加工更有利於金紅石相態的生成，且能提升製程穩定性。照光LED燈板中心波長為385 nm情況下全數試片的亞甲基藍降解率皆明顯優於對照組的鈦金屬基板；而在中心波長445 nm可見光照射下亞甲藍降解率雖略為下降，但仍明顯高於對照組鈦金屬基板，並發現在富含氧的環境下雷射加工有利於擴大製程有效焦距範圍，且能增加光催化穩定性。照光波長在 380 nm、445 nm中，光降解時間為4小時，最高的亞甲基藍降解率則分別為61%、45%。

關鍵字

綠光皮秒雷射 ； 二氧化鈦 ； 黑色二氧化鈦 ； 鋭鈦礦 ； 金紅石 ； 光觸媒 ； 通氧 ； 亞甲基藍光降解

並列摘要

In this paper, a method for preparing black titanium dioxide by picosecond laser is proposed, and black titanium dioxide is prepared on titanium metal substrate by green light picosecond laser. By adjusting the laser power and changing the scanning speed, scanning distance, laser focal length, laser frequency, and processing environment, the black titanium dioxide with different ratios of rutile and anatase was obtained. Scanning electron microscope (SEM), X-ray diffractometer (XRD) and Raman spectrometer were used to measure and analyze the surface morphology and crystal form of the prepared materials. Finally, the optimal picosecond laser process parameters were selected through the above measurement and analysis results combined with methylene blue (MB) photocatalytic degradation experiments, in order to explore the possibility of the application of titanium dioxide prepared by this process in the field of photocatalytic cleaning. The research results show that the surface of the test piece has different appearances due to different laser parameters. It is inferred that the surface of the test piece is disordered, which will enhance the absorption of visible light, and the EDS measurement results show that the test piece has oxygen vacancies (TiO2-x). XRD and Raman spectroscopy measurements found that the material composition contains anatase, rutile, Ti2O3, TiO2-x, and it can be found that in the laser processing environment with rich oxygen is more conducive to form rutile and improve process stability. The degradation rate of methylene blue of all the test pieces was significantly better than that of the titanium metal substrate in the control group when the central wavelength of the LED light panel was 385 nm; while the degradation rate of methylene blue was slightly decreased under the visible light irradiation of the central wavelength of 445 nm, but still obvious is higher than the control group (titanium metal substrate), and it is found that laser processing in an oxygen-rich environment is conducive to expanding the effective focal length range of the process, and can increase the photocatalytic stability. When the illumination wavelength was 380 nm and 445 nm, the photodegradation time was 4 hours, and the highest methylene blue degradation rate was 61% and 45%, respectively.

並列關鍵字

Green Picosecond Laser ； Black Titanium Dioxide ； Anatase ； Rutile ； Photocatalyst ； oxygen ； methylene blue light degradation

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