結合模糊法則與非連續脈波進行雙軸壓電致動平台之定位控制

在本研究中，主要是針對雙軸壓電致動平台，及設計模糊控制器，來進行平台之步進量測與精密定位控制。實驗中使用自行所發展的4-9-9-14壓電致動器來作為該平台之驅動元件，配合使用圖形監控軟體LabVIEW及資料擷取卡NI PCI-6115以得到光學尺之正確位置訊號；由於壓電致動器為非線性特性，所以使用模糊控制器之設計來達到平台定位之目的。在本文中，使用不同之控制法則；以調控驅動電壓及輸入驅動時間(非連續脈波訊號)的參數調整進而改變平台移動之步幅大小，以達到精密定位之效果。本論文將先針對平台進行左右相同移動距離之單點定位，進而得知4-9-9-14壓電致動器之步進能力；從而進行平台之連續追蹤定位。由定位實驗結果可以得知：平台之定位精確度最高可達0.2 μm，平均穩態誤差可在1 μm以下；此外，藉由模糊法則和調控驅動電壓及輸入驅動時間，確實可使壓電致動平台達到1 μm以下之精密定位。

關鍵字

雙軸壓電致動平台； 4-9-9-14壓電致動器；模糊控制器；非連續脈波訊號

並列摘要

In this thesis, the fuzzy controller is X-Y piezoelectric actuated stage that is creation by us and measuring the stage. The 4-9-9-14 piezoelectric actuator developed by our can combine the figure monitor software LabVIEW and the data-mining card NI PCI-6115 to obtain the precision position signal of the linear scale. The fuzzy controller is designed to reach the goal of positioning stage because of the non-linear condition of the piezoelectric actuator. In this thesis, make use of different control rule , usually regulate the driving voltage and discontinuous clock chain signal, of stage would be changed which adjust the displacement of the stage to achieve the target of stage step measurement,Then this precision of the position stage in this thesis is accurate. First, the stage is positioned condition, furthermore, the left and right distance should be immovable, by this experience, the step ability of the 4-9-9-14 piezoelectric actuator can be known. Second, the continuing chasing position of the stage can be tested after the first experience. The result shows that the most precise positioning degree of the stage can be 0.2 μm, and the average degree is under the 1 μm. In conclusion, usually regulate the driving voltage and discontinuous clock chain by fuzzy law can position the stage to a precise degree.