應用TRIZ理論探討廠務系統清潔生產之改善研究

廠務系統於半導體產業及各行業間有著重要但卻是不被重視的地位，半導體及高科技產業對於廠務系統的運轉品質是逐步提高的。因為，廠務系統是牽一髮而動全身，廠務系統的事故，輕則部份廠區無法生產，重則全廠生產停擺，嚴重的可能會有事故的發生，不可不重視。但是，除了要求廠務高運轉品質的半導體及高科技產業外，一般的產業卻對於廠務系統的要求僅限於可用即可的階段。然而，大部份的廠務系統於建廠時即被固定了，鮮少於運轉後能有大幅度的更換或是改善，因此，要有效維持有效率運轉及管理是不容易的。究其原因，即使維護管理人員有勤於維護保養，但是生產是24小時進行的，再加上任何的變更修改皆會影響到生產及無塵室環境的維持，因此，除非必要的修改或是每年的歲修時間外，並無法將生產或無塵室暫停，更不需談論如何進行大規模的改善了。因此，廠務系統的初期建製對於效率的高低將佔有舉足輕重的地位。所以，如果能透過TRIZ的方式及廠務運轉的經驗再加上清潔生產的概念，提供廠務運轉系統設備的改良，使廠務運轉系統設備能降低運轉成本、節能及發揮出該有的運轉效能，也借此能提供相關運轉及設計人員，針對廠務系統有新的改善及設計，以利廠務系統工作及維護管理人員能有效掌握廠務系統之狀態及維持。

關鍵字

無塵室； TRIZ ；廠務系統；清潔生產

並列摘要

Factory service system in the semiconductor industry and other walks is important but it is not the important position. The semiconductor and high-tech facility for the operation quality system need to gradually improve. Because of the facility system like pull one hair and you would move the whole body. For factory system accident, such as one part of factory production was shut down belong not serious, other situation is whole factory shout down, the other may be have a serious accident, It is need to attention. However, nobody but the requirements of facility and high-tech industry ask to operating quality of the semiconductor. In general, the industry has the system requirements for the facility is available could be use. However, most of the facility system was fixed when the factory was builing and they are less requires to replacement or improvement after operation. Therefore, it is not easy to maintain an efficient of transfer and effective operation of management. For this reason, even if the production personnel diligent to maintenance and management, it still diffcult because equipment activation is carried out 24 hours. It is easy to affect the process of production and environment of clean room when we change and modify the facility. Therefore, unless the annual repair of the machine or necessary modification couldn’t let the machine be shut down, not to mention how to improve for large project. Therefore, Factory service system has an important position for efficient during the early establishment. Therefore if applying TRIZ theory with facility operations experience and concept of clean production could be provide facility improvement on system equipment. The facility operating system equipment to reduce operating costs. Energy Saving and running performance have playing, Provide operation and design person about the factory service system how to improve and new design. Convenience facility and maintenance management system work effectively to master the facility and maintain the state system.