In this thesis, SiO and ZnO are used to as the anode buffer layer. We studied the effect of them on the characteristics of organic light emitting diodes (OLEDs). The improvement of OLEDs by O2-plasma treatment on indium-tin-oxide is also studied. When the thickness of SiO and ZnO is 1nm and 2nm, respectively. The performance of OLEDs is better. The dielectric constant of SiO and ZnO is 0.8203 and 0.6828, respectively. It indicates that the insulation ability of SiO buffer layer is batter than that of ZnO. It suggests the buffer layer with a higher dielectric constant can improve OLED performance in a thinner thickness. For O2-plasma, 10min treatment is an optimum in our experiment The O2-plasma treatment can remove ITO surface contamination and then reduces the contact angle and turn-on voltage.