原子力顯微鏡懸臂探針振動模態靈敏性分析

Sensitivity Analysis of Vibration Modes of Atomic Force Microscope Cantilevers

陳冠慈(kuan-Tzu Chen)

指導教授 ： 周煥銘 ； 張文進

崑山科技大學/工程學院/機械工程研究所/碩士(2003年)

https://doi.org/10.6828/KSU.2003.00026

摘要

本文以樑的微小撓曲振動理論，分析原子力顯微鏡(AFM)懸臂探針與材料表面接觸所形成系統之特徵方程式、振動頻率及振動模態靈敏性。本文理論分析包含： 1.法向接觸剛性對撓曲振動模態靈敏性的影響。2.法向接觸剛性和探針傾斜角對撓曲振動模態靈敏性的影響。3.法向接觸剛性及法向接觸阻尼對撓曲振動模態靈敏性的影響。4. 法向和側向接觸剛性及法向和側向接觸阻尼對撓曲振動模態靈敏性的影響。
經分析後發現：1.懸臂探針振動模態靈敏性，隨著法向接觸剛性增加而減少。2.當法向接觸剛性較小時，第一模態的靈敏性高於第二模態的靈敏性，第二模態的靈敏性高於第三模態的靈敏性，亦即低階的振動模態靈敏性高於高階的靈敏性。3.當法向接觸剛性變大時，高階的振動模態靈敏性會高於低階的靈敏性。4.當考慮懸臂探針傾斜角和在法向接觸剛性較小時，傾斜角越小，其所對應的振動模態靈敏性越大，但影響不大。5. 當法向接觸剛性變小時，增加法向接觸阻尼會降低振動模態靈敏性。

關鍵字

側向接觸阻尼 ； 側向接觸剛性 ； 法向接觸阻尼 ； 特徵方程式 ； 原子力顯微鏡(AFM) ； 振動頻率 ； 振動模態靈敏性 ； 法向接觸剛性

並列摘要

In this study, the small amplitude vibration of atomic force microscope (AFM) in continuous material surface contact has been analyzed, including the characteristic equation, frequency and modal sensitivity of the linear vibration system. This study contains the following analyses: 1.The effect of the normal contact stiffness on the sensitivity of the flexural vibration mode. 2. The effect of the normal contact stiffness and the cantilever slope on the sensitivity of the flexural vibration mode. 3. The effect of the normal contact stiffness and the contact damping on the sensitivity of the flexural vibration mode. 4. The effect of the normal and lateral contact stiffness and the contact damping on the sensitivity of the flexural vibration mode.
According to the analysis, the following results are obtained：1. As the normal contact stiffness increases, the sensitivity of flexural vibration modes decreases. 2. When the normal contact stiffness is low, the low-order vibration modes are more sensitive than the high-order modes and the most sensitive mode of flexural vibration is first mode. 3. The higher-order vibration modes become more sensitive than the low-order modes when the normal contact stiffness is larger. 4. The horizontal cantilever is slighter sensitive than the sloped cantilever. 5. The sensitivity of flexural modes decreases with increasing normal contact vi damping when the normal contact stiffness is low.

並列關鍵字

atomic force microscope ； characteristic equation

參考文獻

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