微機電射頻雙頻帶分工濾波器之研究

A Study on RF MEMS Dual-Band Multiplexer Band-pass Filter

王明德(Ming-Te Wang)

指導教授 ： 莊國強 ； 林明權

崑山科技大學/工程學院/電子工程研究所/碩士(2005年)

https://doi.org/10.6828/KSU.2005.00071

摘要

此論文提出以微機電(MEMS)製程技術的面微矽加工(Surface micromachining )技術，直接在矽基板上沈積薄膜，再利用體微矽加工(Bulk micromachining)技術，將矽基板蝕刻留下空腔體的薄膜，讓介電係數近似於1，接著配合使用微帶線濾波器和方向耦合器的原理，製作微帶線的帶通濾波器和在氧化鋁基板上製作方向耦合分波器，最後結合濾波器跟耦合器分波器形成一個雙頻帶多工濾波器，以分波器當分工器來選擇頻帶，此分工器結合了微機電製程元件的低成本、小體積、性能佳、IC製程相容性高，並有效的降低微帶線的介質損失(Dielectric Loss )和導體損失(Conductor Loss )，接著採用平面式濾波器常用的微帶線，設計可抑制高次諧波，並且擁有較大頻寬的開迴路共振器、步階式多段式阻抗共振器和雙模態共振器製作帶通濾波器，最後結合耦合器分波器和濾波器，讓此元件有分工濾波器的特性。

關鍵字

薄膜 ； 步階式 ； 微機電 ； 微帶線 ； 濾波器

並列摘要

Combination of bulk micromachining and face micromachining techniques, we present a radio-frequency MEMS stepped open-loop resonator bandpass filter in this paper. By anisotropic etching, a very thin 4mm′4mm dielectric membrane with relative dielectric constant (er»1) was fabricated on a silicon substrate. This structure could effectively reduce the dielectric loss and conductor loss of a microstrip line. This filter pattern composes of two open-loop resonator with asymmetric tapping feed lines. By using the high-frequency printed circuit board as the substrate, the improved stepped open-loop resonator bandpass filter has better performance as compared with the traditional one. . In addition, the MEMS stepped open-loop resonator bandpass filter combination direction couple multiplexes shows its superior performance with power divider function.

並列關鍵字

mem ； stepped ； microstrip ； micromachining ； filter

參考文獻

[1] Abdel-Rahman, A. K. Verma, A. Boutejdar, and A .S. Omar,“ Compact stub type microstrip bandpass filter using defected ground plane,” IEEE Microwave Wireless Comp. Lett., vol.14, No.4, Apr. 2004.

[2] C. Jianxin, Y. Mengxia, X. jun and X. Quan, “Compact microstrip lowpass filter,” Electron. Lett., 27th may 2004 vol. 40 No.11

[3] Jong-Sik Lim, Chul-Soo kim, Young-Taek Lee, Dal Ahn and Sang wook Nam,“Design of lowpass filter using defected ground structure and compensated,”Electron. Lett., 24th Oct. 2002 vol. 38 No.22.

[4] Chi-Hsueh Wang, Yo-Shen Lin, and Chun Hsiung Chen, “Novel inductance-incorporated microstrip coupled-line bandpass filter with two attenuation poles,”IEEE MTT-S Digest 2004.

[5] Peng Yang, ZhiYuan,Yu,“Using generalized transmission line equations to model two-gap structure,” IEEE 2004.