以表面磁場變化動態監控複合鍍層及氮化鈦薄膜之磨潤行為研究

A study of using surface magnetization variations for monitoring the tribological behavior of composite coatings and TiN films

王國興(Kuo-hsing Wang)

指導教授 ： 周煥銘 ； 張育斌

崑山科技大學/工程學院/機械工程研究所/碩士(2007年)

https://doi.org/10.6828/KSU.2007.00031

摘要

本研究採用旋轉式pin on disk摩擦試驗機暨量測系統，於動態的摩擦過程中，量測摩擦係數及表面磁場，以動態監控金屬薄膜之磨潤行為。並且，在摩擦試驗後，量測磨耗損失量(wear loss)及利用電子顯微鏡(SEM)觀察磨耗面與磨耗顆粒。藉由實驗結果得知：(1)複合電鍍有其技術及成本上之困難，但純錫薄膜添加陶瓷微粒，可達到低摩擦抗磨耗且低磁化之效果。(2) 使用表面磁場監控可輕易判斷出CVD鍍氮化鈦之試片的耐磨壽命高於PVD鍍氮化鈦約可達5倍。
對於業界而言，這種新穎性的動態監控方式由於能精準評價不同表面加工方式之磨潤行為，因此具有設計參考上的價值，其工業應用性確實既深且廣。故由實驗結果提出表面磁場變化動態監控複合鍍層及氮化鈦薄膜之磨潤行為的新方法。

關鍵字

氮化鈦薄膜 ； 複合鍍層 ； 金屬薄膜 ； 表面磁場

並列摘要

The experiments were conducted on a pin/disk friction tester with a measuring system to dynamic investigate the tribological behaviors between the metal films in dry severe wear process. The friction coefficient and the surface magnetization were dynamic measured during the friction process. Moreover, the wear loss of the specimens and the SEM observations of the wear tracks and the wear particles were conducted after the friction test. According to the experimental results, the following results were proposed: (1) the composite electroplating was difficult for the technology and cost down. However, low friction, wear resistance and low magnetization can be obtained by using the pure tin films mixed with the micro ceramic particles. (2) it can be easily observed that the wear resistance of the specimen coating with the CVD-TiN films were higher than that of the PVD-TiN films about five times.
Generally, the method of using the variations of the surface magnetization for monitoring the tribological properties was more accurately than the traditional method of using the friction coefficient. Therefore, it was useful in the machine design and applicability for the industry. According to the experimental results of this study, a novel method of using the variations of surface magnetization for monitoring the tribological behavior of the composite coatings and the TiN films can be reasonable proposed.

並列關鍵字

surface magnetization ； composite coatings ； TiN films ； metal films

參考文獻

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[31]王鴻偉，“以純金屬薄膜間微振幅及電位變化監控磨鍍薄層之研究”，碩士論文，崑山科技大學，2006。

[32]蔡齊峻，“以連續摩擦帶電變化監控純金屬薄膜間磨潤行為的新穎方法”，碩士論文，崑山科技大學，2006。

[1]Y. P. Chang, “A novel method of using continuous tribo-electrification variations for monitoring the tribological properties between the pure metal films,” Wear, 262 (2007) 411-423.

[2]F. P. Bowden and D. Tabor, The Friction and Lubrication of Solids, Oxford University Press, Oxford, 1950.