駐波型線性超音波馬達有體積小、重量輕、無噪音、無電磁干擾、高保持轉矩、構造簡單等等的優點。因此,直接驅動型式的駐波型線性超音波馬達在工業界、機器人學、汽車工業吸引了高度的關注。 本文所使用的駐波型超音波馬達其驅動方式也不同於行波型超音波馬達的二相高頻弦波,驅動方式只需單相高頻弦波,所以在實際應用上,沒有兩相弦波電壓不平衡的問題。驅動電路結合以四級電路模組組成,依序為電壓控制振盪電路、電壓控制増益放大電路、功率放大電路與變壓器。並使用數位訊號處理器TMS320LF2407實現PI控制器與模糊類神經控制器進行實驗。 論文中的實驗硬體架構以數位訊號處理器和獨立系統的磁性尺量測系統來實現,根據實驗結果可看出能精確的定位控制。
The standing-wave linear ultrasonic motor(LUSM) has the advantages of small size, no noise, high holding torque, simple structure and on electromagnetic wave effect. Therefore, the standing-wave LUSM attracts special interest as direct drive type actuator in industry, robotics and automotive application. Because the standing-wave LUSM could be supplied by a single phase sinusoidal wave, there is an outstanding performance in practical application without the demerit of the unbalanced two-phase voltages. The drive circuit combines voltage-controlled oscillator circuit, voltage-controlled amplifier circuit, power amplifier and transformer. The PI controller and FNN controller were implemented for experiment using digital signal processor TMS320LF2407. The hardware of experiment system is implemented with digital signal processor based microcontroller and magnetic length measuring system. The experiment results show the superior performance of position control in the LUSM