- 學位論文
以低溫水溶液法合成之氧化鋅奈米柱特性分析
Characteristics of ZnO Nanorod Synthesised by Low Temperature Aqueous Solution
摘要
本論文以低溫水溶液法製備不同表面型態的氧化鋅奈米柱（ZnO nanorods），使用的反應物為硝酸鋅與環六亞甲基四胺，在溶液中加熱至90 ℃後即可生出氧化鋅奈米柱。並使用X光繞射儀 (XRD) 、原子力顯微鏡 (AFM)與掃瞄式電子顯微鏡 (SEM) 來分析其相組成與表面型態，並利用光激發螢光光譜儀 (PL)來量測其所生長氧化鋅奈米柱之材料特性。 本論文研究主要可分為兩個部分，第一部份為利用射頻磁控濺鍍系統沉積ZnO晶種層(ZnO seed layer)於玻璃基材上，作為成長氧化鋅奈米柱(ZnO nanorods)的成核層，再經由不同熱退火溫度來探討退火條件對氧化鋅晶種層的影響。本研究製備的氧化鋅晶種層，藉由SEM 及XRD 分析薄膜物性，探討氧化鋅薄膜於不同熱退火處理後微結構之變化，並利用光激發光譜儀PL分析薄膜光學特性。 第二部份，本研究使用低溫水溶液法（Low Temperature Aqueous Solution Method），將鍍好之ZnO晶種層，放置於利用硝酸鋅（Zinc Nitrate）與環六亞甲基四胺（Hexamethylenetetramine, HMTA）混和之溶液中，再將其放置於烘箱中，透過低溫加熱成長ZnO奈米柱，以過飽和析出的方式在氧化鋅晶種層上成長氧化鋅奈米柱。藉由改變其溶液濃度，探討其製程參數對於成長ZnO奈米柱的結晶特性、表面形貌、與PL特性之影響。
並列摘要
In this thesis, ZnO nanorods were synthesized on the glass substrates in a solution of Zn(NO3)2．6H2O and HTMA at 90℃ The morphologies and microstructures of the ZnO films and nanorods are characterized by X-ray diffraction (XRD) patterns, atomic force microscopy (AFM), scanning electron microscopy (SEM), and photoluminescence (PL). First, the ZnO seed layer was deposited on glass structure by the RF sputtering system to study the effect of ZnO nanorods. The effects of different annealing temperature on the seed layer growth have been investigated in this study. The microstructure was investigated by glazing incident X-ray diffraction and high resolution transmission electron microscopy. The property of luminescence was measured by PL. Second, after the growth of ZnO seed layer, the substrate with ZnO seed layer is placed in the low temperature aqueous solution under different experimental conditions, which the aqueous solution of Zn(NO3)2•6H2O and C6H12N4 was prepared. The Zn(OH)2 would be supersaturated, and ZnO nanorods would be precipitated and grown on seed layer. The effects of aqueous solution with different concentration on the growth of ZnO nanorods investigation including surface morphology and microstructure was carried out by XRD, SEM and AFM measurements. Also, optical properties were determined by PL analyses.