氮氣流量對氮化鋯薄膜之機械性質影響

Effect of nitrogen flow rate on the mechanical properties of ZrN thin films

周永志(Yung-Chih Chou)

指導教授 ： 劉見成

崑山科技大學/工程學院/機械工程研究所/碩士(2008年)

摘要

本研究利用反應磁控濺鍍設備，改變氮氣流量，鍍層氮化鋯薄膜在模具鋼(SKD11)上。研究氮氣流量的變化對退火前後的機械性質與磨耗性質的影響。利用XRD觀察薄膜結晶情形，並利用掃描式電子顯微鏡(SEM)觀察表面形態及以原子力顯微鏡(AFM)觀察表面粗糙度，膜厚量測使用探針式表面輪廓儀，利用奈米壓痕分析微硬度及楊氏係數值，以及使用Pin-on-disk磨耗試驗分析摩擦係數。
XRD分析結果顯示，氮氣流量在4sccm以下有ZrN(111)、(200)結晶向，而氮氣流量高於4sccm，無明顯的ZrN結晶向。在機械性質方面，退火後之楊氏係數與奈米硬度值均有提升的現象，經由pin-on-disk磨耗測試後，發現退火400℃後，氮氣流量32sccm時，有較優異的摩擦係數。

關鍵字

氮化鋯 ； 直流反應磁控濺鍍 ； 磨耗

並列摘要

Study of ZrN thin films coatings deposited on steel substrates (SKD11) at different nitrogen partial pressures using reactive DC magnetron sputtering. Study of Mechanical and trbological properties are on annealing fore and aft in different nitrogen rates. The films crystal structure was identified by X-ray diffraction (XRD) method, SEM to study the microstructures and AFM to study the surface roughness, thickness is measured by a stylus profiler (XP-2 stylus profiler). Nanoindentation test to study the microhardness value and Young’s modulus, Pin-on-disk wear test to study the friction coefficient.
The XRD study shows that under nitrogen rates films present have crystallization of ZrN peak as (111),(200) in opposite to over nitrogen rates films which become more and more amorphous of ZrN peak as the nitrogen flow increases beyond 4sccm. On mechanical properties, Young’s modulus and microhardness value are advancement on after annealing at 400℃. After the pin-on-disk test wear test, found the best friction coefficient versus nitrogen flow 32sccm of ZrN thin films.

並列關鍵字

zirconium nitride ； DC reactive magnetron sputtering ； wear.

參考文獻

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