- 學位論文
以活性碳處理TFT/IC產業O3/DI製程廢液之反應及應用性研究
Fundamental and Application Study of Reactivity between Activated Carbon and Waste Aqueous Ozone from O3/DI Process in TFT/IC Industry
摘要
本研究進行以活性碳處理TFT/IC產業O3/DI製程廢液之反應及應用性研究。以批式反應器進行活性碳與液相臭氧基礎反應性研究。在批式系統中配合液相臭氧濃度檢測、pH stat應用（量測反應過程氫氧根離子消耗量）及活性碳濃度觀察，結果發現不論O3/DI/木炭PAC、O3/DI/椰殼PAC或O3/DI/石墨系統中液相臭氧消失速率於較低溶液pH值（pH<5）反應系統下，液相臭氧消失速率受溶液pH值變化影響不大；於低中高溶液pH值（pH>5）反應系統下，液相臭氧消失速率隨溶液pH值增加而增加。O3/DI/活性碳系統中液相臭氧之整體反應數率常數扣除O3/DI系統之反應數率常數發現，活性碳與液相臭氧之反應數率常數幾乎不受溶液pH變化而影響，亦即以活性碳處理低溶液pH值之液相臭氧深具經濟效益。液相臭氧間接以自由基與活性碳之反應之反應速率遠高於液相臭氧與活性碳直接反應，因此活性碳於溶液pH9知消失速率遠高於溶液pH1之活性碳消失速率。O3/DI/木炭PAC與O3/DI/椰殼PAC反應後濁度比O3/DI/石墨來得高，因此石墨材質的碳粉應用性可能木炭PAC及椰殼PAC來得高。由於O3/DI/石墨系統的液相臭氧之消失速率與比表面積之比值高於O3/DI/木炭PAC系統，因此對於後續對於處理含液相臭氧廢水的發展可朝以相對單純碳元素之材料進行研究。
並列摘要
“Fundamental and Application Study of Reactivity between Activated Carbon and Waste Aqueous Ozone from O3/DI Process in TFT/IC Industry” was carried out in this study. The research was studied under various solution pH values, types of activated carbon for the establishment of the kinetic model and the selection of optimum activated carbon to get the higher removal rate of aqueous ozone and the lower intermediate during reaction in batch reactor. The experimental results shows that the removal rate of aqueous ozone could be enhanced by the dosage of activated carbon at various solution pH value. Innovation of aqueous ozone removal, hydroxide ion addition and activated carbon dosage in order to verify the reaction mechanism of aqueous ozone removal by activated carbon. The aqueous ozone was removed dominantly by direct reaction with activated carbon with lower reaction rate at acidic solution, and that was eliminated with hydroxide ion’s catalytic reaction with higher reaction rate at alkaline solution. And the removal rate of aqueous ozone by activated carbon was almost not affected by various solution pH. That indicate activated carbon will be economical for aqueous ozone removal at lower solution pH condition. The turbidity in O3/DI/graphite system is lower than that in O3/DI/PAC system. And the ratio of aqueous ozone removal over the surface area of graphite is higher than that of PAC. Consequently, our future study will focus on the the material with more pure carbon for aqueous ozone removal.
參考文獻
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