焦電元件設計於綠能之應用

Designs of Pyroelectric Devices for Green Energy Applications

蕭安盛(An-Shen Siao)

指導教授 ： 蕭俊卿

國立虎尾科技大學/工程學院/機械設計工程研究所/碩士(2013年)

摘要

鋯鈦酸鉛已廣泛應用於焦電獵能元件，將廢熱轉換為電能，達成能源再利用之綠能科技。因焦電層之時變溫度率大幅影響焦電元件之熱電轉換效率，本研究以有限元素模擬及實驗量測設計焦電獵能元件，並利用晶圓切割法與噴砂蝕刻法，製作三維結構之鋯鈦酸鉛焦電獵能元件，並於不同熱源溫度及升降溫週期之條件下，探討不同溝槽寬度、深度及不同幾何結構對於焦電獵能元件效率之影響。由模擬結果得知，溝槽寬度50μm及溝槽深度150μm，其時變溫度率相較於全覆蓋型之焦電元件可提升約402.65%，且渦旋狀型之時變溫度率也較於全覆蓋型之焦電元件改善約54.08%。另由實驗結果得知，以噴砂蝕刻法製作寬度200μm深度170μm之渦旋狀型焦電元件，其電荷量較全覆蓋型提升約56.63%，再經由橋式電路整流，將22μF之電容儲存至能量1.1mJ僅需143秒，為全覆蓋型焦電元件儲能速度之2.6倍。因此以噴砂蝕刻法製作多樣複雜之三維結構焦電元件，可提升鋯鈦酸鉛焦電獵能元件之熱電轉換效率。

關鍵字

綠色能源 ； 焦電效應 ； 鋯鈦酸鉛 ； 噴砂蝕刻法 ； 渦旋狀型

並列摘要

Lead zirconate titanate (PZT) has widely been used in thermal energy harvesting by pyroelectric effect, which can convert thermal energy into electricity for energy recycling in green technology. Temperature variation rates in pyroelectric materials significantly affect electrical outputs of pyroelectric devices. In the present study, the structures of pyroelectric materials were designed for improving the temperature variation rate by finite element method, and then the pyroelectric devices with variuos three-dimensional patterns were fabricated by dicing saw apparatus and sandblast etching for enhancing the electrical outputs of the pyroelectric devices. The pyroelectric devices with various trench widths, depths and patterns under various measured temperatures and periods were further discussed. In the simulation results, the partially covered type with a 50 μm trench width and a 150 μm trench depth improved the temperature variation rate about 402.65 %, compared to the fully covered type. The temperature variation rate in the vortex-like type was higher than that in the fully covered type about 54.08 %. In the experimental results, the vortex-like type with a 200 μm trench width and a 170 μm trench depth fabricated by sandblast etching improved the electrical generation rate about 56.63 %, compared to the fully covered type. Moreover, the vortex-like type was used to store a 1.1 mJ electrical energy in a 22 μF electrolytic capacitor with 143 seconds via a full-bridge circuit. The vortex-like type was 2.6 times the charged speed of the fully covered type. Therefore, the sandblast etching can fabricate complex three-dimensional patterns in the pyroelectric devices for ameliorating the thermal energy harvesting.

並列關鍵字

Green energy ； Pyroelectric effect ； Lead zirconate titanate ； Sandblast etching ； Vortex-like pattern

參考文獻

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