結合共光程外差干涉技術及表面電漿共振技術之表面形貌儀

Optical Profilometer Based on the Techniques of Common-Path Heterodyne Interferometey and Surface Plasmon Resonance

高培瑋(Pei-Wei Gao)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2012年)

摘要

本文主要利用共光程外差干涉術（Common-path heterodyne interferometry (CPHI)）結合了表面電漿共振(Surface plasmon resonance；SPR)角度量測架構，來做為表面形貌或位移之量測。
當透鏡之穿透光束入射待測物後，反射光束因待測物有表面高度變化，使得光束產生極微小的角度偏向變化。當光束返回透鏡再經由SPR微小角度感測器時，因入射角已偏離了共振角，而造成SPR感測器有明顯的相位變化，最後由共光程外差干涉術來得到此相位變化值。由於待測物的表面形貌變化與所得之相位變化成正比，所以當連續掃描此表面以量測個別相位變化時，即可描繪出待測物的表面形貌。縱向解析度方面可高逹10奈米等級，其優點有高縱向解析能力、非接觸性、非破壞性、樣品不需有導電性且透明物件亦可測量，不用任何額外的表面處理，可即時量測其表面形貌，若有較大位移時，可配合共軛焦及光位位置感測器而同時獲得較大高度量測及高精確度的表面形貌量測。

關鍵字

表面電漿共振技術 ； 位置靈敏感測器

並列摘要

The proposed profilometer with a ten nanometer vertical resolution is based on common-path heterodyne interferometry and the surface plasmon resonance (SPR) angular sensor . The measurement range is proportional to the inverse of the numerical aperture value. Based on the geometrical optics, when the transmitted light from a lens is incident upon a specimen which is located at the focal plane, the reflection beam back to and after the lens, the light will converges or diverges because of the surface height variations, and then deflects a small angle from the optic axis . Let the beam pass through a SPR angular sensor, the small angle change causes the phase difference change between the test beam and reference signal. So, we can use the heterodyne interferometry to measure this phase value, and transfer it to a surface height. The method has some merits, such as, non-contact, non-destructive, and real-time measurement. The lateral resolution is about several tens μm and the vertical resolution is better than 10nm . We can use it to measure a step height or the thickenss of a film in real-time

並列關鍵字

SPR ； PSD

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