可調式微凹面鏡及其在生物檢測系統之應用

An adjustable Micro-concave Mirror and Its Application on Bio-detection Systems

陳維倫(Wei-Lun Chen)

指導教授 ： 覺文郁

共同指導教授 ： 郭如男(Ju-Nan Kuo)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2008年)

https://doi.org/10.6827/NFU.2008.00004

摘要

本論文以面型微細加工製程設計一可控制曲度以改變不同的焦距之微凹面鏡，利用微機電系統製程技術以製作可調式微凹面鏡光學元件。本研究結合雙層材料之殘留應力與代工製程(MUMPs)，讓圓形平面結構因殘留應力作用使之翹曲成一碗狀微凹面鏡結構。並利用後處理溫度及靜電力驅動來改變微凹面鏡之變形曲率，達到改變焦距的目的。
本研究可分為模擬分析及實作量測兩方面。在模擬分析方面，以有限元素法套裝軟體ANSYS針對不同的設計來分析結構與熱應力變形的關係，這些模擬分析結果均可提供設計此元件參數條件的依據，可節省時間及成本上不必要的浪費。在實作方面，則製作出半徑400微米的十二分割扇形鏡面結構，控制後處理溫度並量測計算後得知其末端翹曲量為17.6~127.5微米，並可由後處理溫度(25-330℃)控制微凹面鏡焦距變化在2275.0~313.5微米及電壓操控(0-160V)控制焦距變化在313.5~419.5微米之間。最後本研究提出整合此可調式微凹面鏡、光學檢測系統及流式細胞儀來檢測螢光微粒，提供在生物檢測方面之應用。

關鍵字

微凹面鏡,微機電系統,有限元素法,生物檢測

並列摘要

This paper presents an adjustable micro-concave mirror and its application on bio-detection system. The bio-detection system consists of the adjustable micro-concave mirror, a micro flow cytometer chip, and an optical detection module. The adjustable micro-concave mirror could be fabricated with ease using commercially available MEMS foundry service (such as multiusers MEMS processes, MUMPs). The thermal effect of micromachined bilayer micro-concave mirrors was first investigated. A finite-element model has been established to analyze such a deformation. Postprocessing temperature and curvature reveal a close relationship. As postprocessing temperature increases, the curvature of the micro-concave mirror increases, resulting in a larger out-of-plane deformation of the micro-concave mirror. The proposed adjustable micro-concave mirror has the potential to be widely used for micro-optics or biophotonic applications.

並列關鍵字

MEMS, Micro-concave Mirror, Thermal Effect, Bio-detection

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