- 學位論文
磷摻雜氧化鋅奈米柱同質接面光感測器之研製
Fabrication of Homojunction Photodetectors with Phosphorus-Doped Zinc Oxide Nanorod Arrays
摘要
本研究以氧化鋅奈米柱同質製作光感測器為研究主題，利用便宜且簡單的水熱法，對氧化鋅進行摻雜不同濃度的磷，研究如何成功製作穩定並且特性良好的P型氧化鋅，再堆疊未摻雜氧化鋅，使之形成PN接面，完成一同質光感測器，以減少晶格不匹配等等造成的失真。其主要研究大致可分為兩個大部分： 第一部分：使用射頻磁控濺鍍機在玻璃基板濺鍍上一層氧化鋅薄膜作為種晶層後，放入配置有不同重量百分比之含磷溶液中生長，待生長完畢，即放入去離子水清洗表面，清潔完表面後，使用快速熱退火試片進行處理，接著透過霍爾量測(HALL)、二次離子質譜儀(SIMS)、穿透式電子顯微鏡(TEM)及能量分散光譜儀(EDS)對磷摻雜之狀態進行分析，並探討濃度摻雜是否良好，隨後使用X光繞射頻譜圖分析(XRD)、紫外光-可見光分光光譜儀(UV-VIS)、螢光光譜儀(PL)，對磷摻雜氧化鋅奈米柱進行分析，探討出特性較佳的濃度。 第二部分：將特性較佳之磷摻雜基板放入溶液中，使用水熱法生長氧化鋅奈米柱，堆疊於磷摻雜氧化鋅之上，形成PN接面，接著使用環境掃描電子顯微鏡(SEM)進行表面結構分析，分析後於氧化鋅奈米柱上塗上銀膠，當電極使用，並且使用太陽光模擬量測與IV量測系統進行參數分析，比較可以發現摻雜濃度對於元件影響非常大，摻雜太多會使得特性下降，摻雜太少又會使得特性無法出來，故磷摻雜之分析對往後元件影響非常深遠。
並列摘要
In this study, the production of zinc oxide nanorods homogeneous light sensor to study the theme, the use of inexpensive and simple hydrothermal method, zinc oxide is doped with different concentrations of phosphorus and how to successfully make stable and good characteristics of P-type oxide zinc, and then stacking undoped zinc oxide, and make it a PN junction, complete a homogeneous light sensors to reduce lattice mismatch and so distortion caused. The main research can be divided into two parts: The first part: using RF-magnetron sputtering machine on a glass substrate by sputtering a layer of zinc oxide thin film as a seed layer after, arranged into different percentages by weight of phosphorus was grown until the growth is completed, i.e., into the deionized water clean the surface, after cleaning the surface of the specimen using a rapid thermal anneal processing, followed by Hall measurement (HALL), secondary ion mass spectrometry (SIMS), transmission electron microscopy (TEM) and energy dispersive spectroscopy (EDS ) on the state of phosphorus doping analysis, and to explore the doping concentration is good, then used X-ray diffraction spectrum analysis (XRD), UV - visible spectrophotometer (UV-VIS), fluorescence spectroscopy (PL), Phosphorus-doped zinc oxide nanorods were analyzed to explore the characteristics of the preferred concentration. Part II: The better the properties of phosphorus-doped substrate into the solution using a hydrothermal growth of ZnO nanorods, stacked on top of phosphorus-doped zinc oxide to form a PN junction, and then use an environmental scanning electron microscope ( SEM) surface structure analysis, analysis after column coated with zinc oxide nano-silver plastic, when the electrode used, and using a solar simulator IV measurement and parameter measurement system analysis, comparison can be found in the doping concentration influence the elements very big, too much will make the characteristic decline doping, doping will make features can not be too out of the analysis of the future impact is far-reaching element of it is doped with phosphorus.