填孔凹陷量測技術精度提升之研究

科技的進步、產業競爭激烈，在於成本及效益的考量下，許多工廠趨向使用自動化設備取代於人工檢測，於產品的精密程度要求提高，因此需要有高精度檢測設備來控管製作之品質。本研究主要利用高亮度LED以提升相機對光源感光能力，且本實驗檢測原理所使用的白光干涉技術是根據白光具有連續波長之頻譜，使得干涉條紋具同調長度較短的特性，將原有鹵素光改用高強度白色LED光來提升相機對影像感光能力。經由理論及實驗得知，使用高亮度LED光對於量測到之待測物確實在不同速度下均比鹵素燈擷取到影像亮，且LED光重複精度優於鹵素光， LED光於20K時重複精度差異最大為2.3um，而使用鹵素光差異最大為5.7um，30K速度時LED光差異最大為2.3um，鹵素光差異最大為8um，速度為40K時LED光差異最大為2.1um，而鹵素光最大差異為5.9um，主要原因為使用鹵素光時，相機所擷取到受測物亮度不足，而無法正確計算深度位置。

關鍵字

LED光；相移分析；白光干涉

並列摘要

Advances in technology, industry competition, lower costs and benefits of that consideration, many factories tend to use automated equipment to replace the artificial testing, the degree of precision required to improve the product, thus the need for high-precision testing equipment to control quality productions. In this study, the use of high-brightness white LED to enhance the ability of the camera to the light sensitive, and the assay used interferometry principle is based on a continuous spectrum of white light with a wavelength of such interference fringes with a short coherence length feature, the original halogen high-intensity white LED light instead of light to enhance the ability of the camera for photographic images. Theoretical and experimental learned through the use of high brightness LED light for measurement of device to do at different speeds to capture images brighter than halogen and LED light repeatability better than halogen light, LED light at 20K when Repeatability biggest difference is 2.3um, but the biggest difference is the use of halogen light 5.7um, 30K speed LED light when the biggest difference is 2.3um, halogen light, the biggest difference is 8um, speed of 40K LED light when the biggest difference is 2.1um, while halogen light biggest difference is 5.9um, mainly due to the use of halogen light, the camera captured the EUT to insufficient brightness, depth position can not be calculated correctly.

並列關鍵字

Led light ； phas-shift analysis ； white-light interferonmetry

參考文獻

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填孔凹陷量測技術精度提升之研究

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