介層設計多層氮化鋁鈦硼硬質鍍膜之高溫氧化及機械性質分析

Influence of Interlayer Design on the Mechanical Properties and High Temperature Oxidation of AlTiN/TiBN Multilayered Hard Coatings

周俊豪(Jun-Hao Chou)

指導教授 ： 張銀祐

共同指導教授 ： 張奇龍

國立虎尾科技大學/工程學院/機械與電腦輔助工程系碩士班/碩士(2016年)

摘要

過渡物金屬氮化物，如氮化鋁鈦、氮化鈦及氮化鈦硼薄膜，由於其優異的摩擦性能已被用來作為保護性硬塗層，在本次研究中利用陰極電弧沉積系統調製AlTiN/TiBN奈米多層薄膜，選六吋鈦靶、四吋鋁鈦靶(Al:Ti合金比例67:33)及四吋鈦硼靶(Ti:B合金比例95:5)沉積漸進層及多層AlTiN/TiBN多層薄膜，鍍製過程中藉由改變不同介層(TiN、AlTiN、TiBN)設計多層結構提高薄膜與基材之機械性質及附著強度。多層厚度及薄膜沉積成份與陰極材料之蒸發速率有關，藉由控制合金靶電流及旋轉速度，來製備出週期性AlTiN及TiBN不同介層之多層AlTiN/TiBN薄膜。
本實驗沉積薄膜結構使用場發射掃描電子顯微鏡(FE-SEM)及高解析穿透式電子顯微鏡(HR-TEM)搭配能量散射光譜分析儀(EDS)觀察薄膜之橫截面、表面形貌及元素分析，再透過X光繞射儀(XRD)鑑定薄膜高溫處理前後之晶相分析及殘留應力，以二次離子質譜儀(SIMS)來分析高溫氧化後縱深成份及熱擴散情形。針對機械性質部分，利用洛氏壓痕及刮痕試驗對薄膜做附著性測試，藉由微小維克氏硬度試驗機量測薄膜硬度並比較高溫處理後薄膜強度。利用動態衝擊試驗機進行常溫抗疲勞韌性試驗，並用EDS分析薄膜衝擊後破損情況。
根據研究結果顯示以TiBN薄膜為介層之多層薄膜Multi-TiBN在常溫時擁有高硬度(Hv4088)及低殘留應力(-2.82GPa)與良好抗衝擊韌性。經高溫氧化處理後，以TiBN為介層之多層薄膜Multi-TiBN仍保持有最高之硬度(Hv3780)與最低之磨損率(4.66x10-6mm3/Nm)，並於高速切削Ti-6Al-4V鈦合金測試中，適當切削參數條件下，TiBN為介層之多層薄膜Multi-TiBN具有最低之刀腹磨耗與加工表面粗糙度，故利用TiBN為介層之多層薄膜Multi-TiBN可有效降低殘留應力，並同時具備高溫切削時之硬度與抗磨損能力，有效提升高速切削鈦合金之刀具壽命與加工品質。

關鍵字

硬質薄膜 ； 機械性質 ； 介層 ； 氮化鋁鈦硼(AlTiN/TiBN) ； 殘留應力

並列摘要

Transition metal nitrides, such as AlTiN, TiN and TiBN, have been used as protective hard coatings due to their excellent tribological properties. In this study, AlTiN/TiBN coatings were synthesized by cathodic-arc evaporation. AlTi and TiB alloy cathodes were used for the deposition of multilayered AlTiN/TiBN coatings. During the coating process of AlTiN/TiBN, different interlayers of TiN , TiBN and AlTiN were deposited to enhance mechanical properties and adhesion strength between the coatings and substrates. The multilayer thickness and alloy content of the deposited coating were correlated with the evaporation rate of cathode materials. By controlling the cathode current and rotation speed, the deposited multilayered AlTiN/TiBN coatings possessed periodic AlTiN and TiBN layers.

The microstructure of the deposited coatings was investigated by a field emission gun high resolution transmission electron microscope (FEG-HRTEM), equipped with an energy-dispersive x-ray analysis spectrometer (EDS). Glancing angle X-ray diffraction was used to characterize the phase identification and residual stresses of the films. Then used secondary ion mass spectroscopy (SIMS) was used to measure the oxidation scale of the deposited coatings after oxidation. Mechanical properties, such as the hardness and elastic modulus, were measured by means of Micro Vickers indentation. A dynamic impact fatigue test was used to evaluate the impact fatigue performace .

The results showed that the multilayered AlTiN/TiBN with a TiBN interlayer possessed good adhesion strength and the highest hardness. Due to the proper design of interlayers, the multilayered AlTiN/TiBN with TiN and TiBN showed good impact fatigue resistance. After oxidation at 700℃, monolayered TiN and TiBN showed obvious oxide scales. The multilayered AlTiN/TiBN had good oxidation resistance due to the periodic structure of multilayers and good adhesion strength. For the high speed cutting test of Ti-6Al-4V alloys, under proper cutting parameters, the multilayered AlTiN/TiBN with an interlayer of TiBN showed the lowest flank wear and the surface roughness of the machined Ti alloy. The multilayered AlTiN/TiBN with an interlayer of TiBN can reduce the film residual stress, and maintain high hardness and abrasion wear resistance at high cutting temperature. Therefore, effectively improves the tool life and cutting quality for high speed cutting of Ti alloys.

並列關鍵字

Hard coating ； Mechanical Properties ； Interlayer ； AlTiN/TiBN ； Residual stress

參考文獻

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