- 學位論文
長行程奈米級精密平台研製
Design and Control of a Long-Stroke-Nano-Positioning Stage.
若您是本文的作者，可授權文章由華藝線上圖書館中協助推廣。
摘要
本論文研製一奈米級長行程精密定位平台，並整合精密控制、精密量測、結構設計與加工組裝等四項主體，其特色是結合X-Y雙軸長行程導螺桿平台、三自由度壓電微動平台、三自由度量測系統與雙軸長行程奈米級精密平台控制系統。藉由X-Y雙軸長行程導螺桿平台進行微米級長行程定位後，再由三自由度壓電微動平台進行奈米級定位，最後經由三自由度量測系統，將量測數據傳送至PID控制系統，使本平台具有300 × 300 mm之長行程定位能力、定位可達10奈米之高精度、可以34.5 mm/s之高速度移動以及可讓偏搖角補償達1 acesec之低角度誤差等特性。
關鍵字
無資料並列摘要
A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.
並列關鍵字
無資料參考文獻
[2] D.W. Pohl, “Dynamic Piezoelectric Translation Devices,” Rev. Sci. Instrum. , vol. 58, no.1, Jan., 1987.
[3] P. Niedermann, R. Emch, and P. Descouts, “Simple Piezoelectric Translation Device,” Rev. Sci. Instrum, vol. 59, no. 2, Feb., 1988.
[4] P. Muralt, A. Kholkin, M. Kohli, T. Maeder,and N. Setter, “Characterization of PZT thin films for micromotors”, Electronic Journals Volume: 29, Issue: 1-4, December, 1995, pp. 67-70
[5] Ch. Renner, Ph. Niedermann, A. D. Kent, and O. Fischer, “A Vertical Piezoelectric Inertial Slider,” Rev. Sci. Instrum., vol. 61, no. 3.
[6] R. Smith, S. Gwo, and C. K. Shih, “A New High-Resolution Two-Dimensional Micropositioning Device for Scanning Probe Microscopy Applications,” Rev. Sci. Instrum., vol. 65, no. 10, Oct., 1994.