- 學位論文
彩色光阻之顏料分散法最佳化研究
Optimization Study by Pigment Dispersion Method for Color Filter Fabrication
摘要
彩色濾光片(Color filter , CF)為薄膜電晶體液晶顯示器(Thin Film Transistor Liquid Crystal Display，TFT-LCD)的關鍵性零主件，佔LCD總材料成本約10~15％。而彩色濾光片製程又以顏料分散液法為主要生產技術。本論文討論彩色光阻組成，利用不同比例材料進行調製；以及調製完成後的光阻所進行的相關製程，例如，微影製程、顯像製程。彩色光阻樣本於CF製程中，可能會出現線條剝落及線性不佳之狀況。推測原因為顯影時顯影液與光阻會進行激烈反應並造成撕裂性溶解。而經過評價實驗後，將Monomer、光起始劑、添加劑比例降低，與更換容易溶解於弱鹼性顯影液的Polymer後，其顯像特性、狀況就可以明顯的改善。另外Taper剖面角度過於垂直的問題，可藉由更換成反應波長範圍較小的光起始劑或更換Monomer種類解決。
並列摘要
The color filters (CF) are the key parts of thin film transistor liquid crystal display (TFT-LCD), and they take the 10~15% of the total materials cost in the TFT-LCD manufacture. The pigment dispersion (paste) based method is the main technology of production. This thesis discusses the different compositions of color resists (CR) and their related processes, included lithography and development. Under the CF processes, the peelings and fringes might happen in the final products. It is estimated that the color resists will strongly react with developer and cause dramatically decompositions in the edge of CR. From the evaluation results, the develop characteristics can be obviously improved by lowering the ratios of monomers, photo initiators, and additives and changing the species of polymers which would be easier to dissolve in the alkaline developers. In the issue of the taper profile angle, the cliffy taper angle can be improved by changing the photo initiators, which will response with the narrow range of UV wavelength, and species of monomers.