XYR中心旋轉機構量測

The XYR Center Rotation Mechanism Measurement

張明裕(Ming-Yu Chang)

指導教授 ： 李廣齊

國立虎尾科技大學/工程學院/自動化工程研究所/碩士(2014年)

https://doi.org/10.6827/NFU.2014.00120

摘要

曝光機台主要是由光學投影系統及X-Y曝光平台所構成的，提出的光學投影系統，制定了曝光機台對阻劑層的解析極限，而X-Y平台則影響機台對位的精準，進一步影響產品之產能和良率，除了曝光機之外TFT-LCD對位系統也需要精度高的對位系統。
市面上手機面板從過去方正直角規格，慢慢改變成為圓弧角度，設計者為了符合手掌大小及拿取方便也改變整體造型，四角弧面的款式紛紛出品，也因此國內對位模組廠商必須不斷求新求變，符合市場需求。
XYR中心旋轉機構是在X軸、Y軸上方增加R角度，使R角度變大，讓機構適用性更大，精度更準確，對位機構的X軸Y軸及R角，利用軸卡驅動馬達透過軟體來驗證直線性及角度，透過量測方式改善R角度行程，同時驗證平台再現性及機構極限範圍驗證可達到重複性在4μm，定位精度0.01mm，R角度可達到5度，機台成本可降低20%，提供給廠商更優質的產品，提升產業競爭力。

關鍵字

對位系統 ； 直線性 ； 定位 ； 極限範圍 ； R角度

並列摘要

Lithography machine mainly consists of optical projection system and X-Y lithographic stage. The optical projection system proposed by this essay defined the resolution limit of resist and X-Y stage affected the alignment accuracy of lithography machine. The productivity and efficiency of lithography machine will be determined on the two above mentioned factors as well. Besides, TFT-LCD also requires higher precision alignment system.
With the rapid development in science and technology, the touch panel shape especially in smartphones has been transferred to curved angle. The designers have also changed the overall model for easily carrying and satisfying palm-sized requirement; therefore, domestic positioning model suppliers have to continuously innovate in order to meet the market demand.
The XYR center rotation mechanism measurement combines R-angle with x-axis and y-axis which enlarge the R-angle scope to improve the mechanism flexibility and precision. The x-axis, y-axis and R-angle of alignment system utilize the motion card to verify linearity and angle through software and improve R-angle stroke through measurement method. As a result, the verification result of the stage reproducibility and mechanism limit range shows that repeatability can be achieved in 4μm, positioning precision can be achieved in 0.01mm, and R-angle can be achieved in 5 degrees with at least 20% lower cost for allowing suppliers to provide better products and improve their competitiveness in the industry.

並列關鍵字

R-angle ； alignment system ； precision ； mechanism

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