- 學位論文
微型刀具線上檢測系統開發
Development of an On-line Detection System for Micro Cutters
摘要
本論文提出微型刀具線上檢測系統開發，主要是使用一雷射平行光束、光位置感測器與聚焦透鏡位置關係所形成，測量方法採用光強的能量關係比值與光學非接觸特性，當刀具刀尖由Z軸座標往下移動，可得到一最大極值電壓，記錄此控制器座標便為Z軸刀尖定位座標，再利用四象限感測器的能量分佈關係比配合刀緣掃描法，當刀具移動掃過雷射聚焦點後(Y軸)，即可得到一最大與最小電壓極值，將兩極值相減乘上位移進幾速率，便可測得刀徑尺寸大小。 本量測系統以實際架設於微型加工機上進行量測，而實際量測結果與實驗室測得數據非常吻合，刀具的Z軸空間座標量測解析度約0.17μm(2δ)與刀尖位置定位誤差約為±0.2μm，而刀徑在X及Y軸空間座標量測解析度約0.12μm (2δ)，實際誤差值為±1μm。
並列摘要
The present paper proposes the Development of an On-line Detection System for Micro Cutters ,mainly uses a parallel laser beam、Optical position sensor and lens position relationship formed,the Measurement of the energy relationship with the ratio of light intensity and optical non-contact characteristics，When the tool tip moves down from the Z-axis coordinate，May obtain a maximum voltage Extreme,may obtain coordinates will be recorded for the Z-axis positioning coordinates Corner,four-quadrant sensor re-use the energy distribution relationship than with the knife edge scanning,when the tool movement swept through after the laser focal point (Y axis), can be an extreme maximum and minimum voltage, the polarization of the displacement by subtracting the value of feed rate, tool diameter can be measured size. The measurement system set up in the micro-processing of the actual machine measurements, and actual results and laboratory measurements are consistent with the measured data, the tool Z axis to measure the coordinates resolution of approximately 0.17μm (2δ) and the tip position location error is about ± 0.2μm, while the knife in the X and Y axis diameter to measure the coordinates resolution of approximately 0.12μm (2δ), the actual error value of ± 1μm.