高硬度多元氮化鉻鋁矽鎢奈米多層薄膜提升碳化鎢刀具之高速切削加工性能應用研究

Improvement of high speed cutting performance of multicomponent CrAlSiWN hard coatings

杜忠穎(Chung-Yin Tu)

指導教授 ： 張銀祐

國立虎尾科技大學/工程學院/機械與電腦輔助工程系碩士班/碩士(2015年)

https://doi.org/10.6827/NFU.2015.00095

摘要

摘要
本研究使用設計新型脈衝磁控陰極電弧物理氣相沉積技術作為鍍膜系統，可有效設計與控制陰極靶功率、製程溫度及偏壓電源之整合調控。製備AlCrSiN、CrWN單層與AlCrSiN/CrWN奈米多層(multilayered)薄膜，探討其微結構、機械性質以及高速切削加工磨潤機制與最佳化鍍膜與製程參數設計。期望同時具有高硬度、低磨耗、良好的附著力及抗高溫氧化特性應用於高速切削加工性能，提昇刀具壽命與加工品質。藉由轉架轉速不同調變多層AlCrSiN/CrWN奈米多層薄膜及高速切削加工刀具之組合設計，期以建立中碳鋼與熱作模具鋼難削材之精密機械加工應用驗證。
本實驗使用場發射掃描電子顯微鏡(FE-SEM)、高解析穿透式電子顯微鏡(HR-TEM)與高解析X射線繞射分析儀(XRD/GIXRD)觀察薄膜高溫處理前後之斷面、表面形貌微結構分析，及化學分析電子光譜儀(ESCA)做高溫氧化之縱深成分分析與鍵結分析，以洛式壓痕試驗機與光學顯微鏡鑑定薄膜附著力，利用動態衝擊試驗機進行常溫與高溫抗疲勞韌性試驗，再以能量光散射儀(EDS)分析衝擊後薄膜破損情形，最後以切削加工刀具之磨耗量做比較。
研究結果顯示AlCrSiN/CrWN奈米多層薄膜隨著轉軸轉速增加，週期厚度也會有下降趨勢，而所有AlCrSiN/CrWN奈米多層薄膜皆具有HF1~HF2之高附著力。AlCrSiN/CrWN多層薄膜皆屬於fcc面心立方晶B1-NaCl結晶構造，轉軸轉速為4rpm下之AlCrSiN/CrWN-4多層薄膜其多層週期厚度為5.8nm (AlCrSiN層厚度為3.3nm，CrWN層厚度2.5nm)。硬度、彈性模數與抗塑性變形隨著週期厚度降低而增加，以AlCrSiN/CrWN-4多層薄膜擁有最小晶粒尺寸9.8nm而具有最高硬度、抗衝擊疲勞性能及抗磨耗性能。乾式切削試驗結果呈現單層AlCrSiWN薄膜雖有高強度的特性，摩擦係數增大，切削後期會有明顯的崩壞情形。本研究所製備之AlCrSiN薄膜在高速切削過程中具有低磨耗及抗高溫氧化，具有較佳之切削性能。適當控制週期厚度之AlCrSiN/CrWN多層薄膜由於多層膜結構能有效抑制晶粒成長導致晶粒細化，降低差排行為所產生的塑性變形，在高速切削時中擁有穩定低磨耗速率。

關鍵字

硬質薄膜 ； 陰極電弧沉積系統 ； 高速切削 ； 氮化鉻鋁矽鎢

並列摘要

Abstract
In this study, the design of new pulsed magnetron cathodic arc physical vapor deposition technology as a coating system can effectively design and control integration cathode target power, process temperature and bias power of regulation. Preparing AlCrSiN, CrWN single and AlCrSiN/CrWN nm multilayer film to explore the microstructure, mechanical properties, and high-speed machining and mill-run mechanism optimized coating design and process parameters. We expect both high hardness, low wear, good adhesion and high temperature oxidation characteristics for high-speed machining performance,improve tool life and machining quality. By turret speed different modulation multilayer AlCrSiN/CrWN nano combination multilayer film and high-speed cutting tools in the design, in order to establish the period for steel and hot-proven precision machining difficult to cut materials of mold steel.
The experiment using a field emission scanning electron microscope (FE-SEM), high resolution transmission electron microscope cross-section (HR-TEM) and high-resolution X-ray diffraction analyzer (XRD / GIXRD) film was observed before and after heat treatment, surface morphology microstructure analysis, and electron spectroscopy for chemical analysis (ESCA) to do in-depth analysis of the components of high-temperature oxidation and bond analysis to Rockwell indentation test machine with an optical microscope to identify film adhesion, dynamic impact testing machine at room temperature and high temperature anti-fatigue toughness test, then the energy of light scattering instrument (EDS) analysis film break situation after impact, and finally the amount of wear of the cutting tool to compare.
The experiment result shows periodic thickness of multilayered AlCrSiN/CrWN coatings decrease when rotation rate increase and all the AlCrSiN/CrWN nm multi-layer films have HF1~HF2 high adhesive force. AlCrSiN / CrWN multi-layer films belong to a face-centered cubic crystal FCC B1-NaCl crystal structure. If the revolution of AlCrSiN/CrWN-4 multi-layer film is 4rpm, the periodic thickness of multilayered will be 5.8nm (AlCrSiN layer thickness of 3.3nm, CrWN thickness 2.5nm). The hardness, elastic modulus and resistance to plastic deformation increases with the decrease of the thickness of the cycle. Because AlCrSiN / CrWN-4 multilayer film has a minimum grain size of 9.8nm, it has the highest hardness, impact resistance and fatigue properties of anti-wear properties. The result of the dry cutting test shows that AlCrSiWN single-layer film has high strength, but it will collapse obviously after cutting when friction coefficient increases. In high-speed cutting process, AlCrSiN Films of this study have low wear and high temperature oxidation resistance, it has better cutting performance. Due to the multilayer structure can effectively suppress grinding grain growth result in grain refinement, reducing plastic deformation is produced by ranking the difference, AlCrSiN/CrWN multi-layer film which being properly controlled periodic thickness can stable the rate of a low amount of wear in high-speed cutting.

並列關鍵字

hard coating ； cathodic arc deposition system ； high-speed cutting ； CrAlSiWN

參考文獻

20. 周于凱，2014，具韌性漸層氮化鋁鉻矽鈦釩AlCrSiTiVN硬質鍍膜設計與機械性質分析，國立虎尾科技大學機械與電腦輔助工程系研究所碩士論文

82. 羅啟宏，2013，高硬度奈米複合薄膜提升碳化鎢刀具於鈦合金之切削性研究，國立虎尾科技大學機械與電腦輔助工程研究所碩士論文

86. 鄭信民，林麗娟，場發射掃描式電子顯微鏡分析技術應用簡介，工業材料期刊，民92

4. J.Patscheider, T. Zehnder, and M.Diserens, Surface and Coatings Technology. 146-147(2001) 201

7. H.Du H.Zhao,J.Xiong G.Xian, Int J Refract Met Hard Mater, 37(2013), pp.60–66