二氧化鈦微米柱染料敏化太陽能電池與其應用之研究

摘要本研究主要的目的為探討使用TiO2微米柱染料敏化太陽能電池使用於充放電迴路，並提出一低備製成本且具有高產率、均一性的TiO2微米柱的製作方法。TiO2微米柱電極應用於染料敏化太陽能電池上，需藉由染料的吸附作為光敏化劑，以增加電子傳導能力，本研究之微米柱狀電極在吸附N3染料後，發現的確可對工作電極產生光催化作用。本論文的實驗方法是先利用射頻磁控濺鍍法在ITO 玻璃上成長出厚度約為2微米的TiO2薄膜，並利用黃光微影製程，將所需要的電極圖案轉印至薄膜光阻上，並用感應耦合電漿蝕刻 ( ICP-etch )，使用CF4氣體進行蝕刻，形成微米的柱狀TiO2電極，以形成柱高微米TiO2柱狀電極。而相對應之電極則是利用電子槍蒸鍍法製作出的30奈米白金電極，此對應之電極具有使電解質發生還原反應的催化效果。當TiO2微米柱經染料浸泡後之工作電極，和對應之電極製作完成後，在兩電極間注入電解液並完成封裝。最後再對完成的太陽能電池在陽光的照射下進行性能測試。在探討薄膜光特性時，則使用UV-Vis光譜儀的量測，可知薄膜經由乾蝕刻後柱狀電極，和染料敏化後的吸收光譜及其穿透率。並進一步利用掃描式電子顯微鏡（SEM）觀察乾蝕刻後柱狀電極的表面型態，並測試其效率,再將TiO2微米柱染料敏化太陽能電池陣列透過電能轉換電路做充放電實驗,並在同一光源下實際量測電壓電流與計算功率做比較。

關鍵字

太陽能電池

並列摘要

Abstract In this thesis, the main purpose of research use TiO2 micro-tube dye-sensitization solar cell used to charge and discharge circuit, it has many advantages such as low cost, high produce, and uniform TiO2 micro-tube process. The TiO2 micro-tube work electrode soak in dye, and fabrication counter electrode achieved. Then the spacer inject dye between two work electrode and sealed. The experiment method to use radio frequency magnetism sputter and photolithography process growth TiO2 thin film about 2 μm on ITO glass, and then we need electrode pattern transfer to PR. After the TiO2 use to ICP-etch, and the micro-tube electrode pattern used to CF4 etch has formed micro tube TiO2 electrode in the end. The TiO2 micro-tube were applied on dye-sensitization solar cell. The rough surface through dye absorption increase electron transmission. The micro-tube electrode absorption N3 dye could electrode production photochemical catalysis. The Pt counter electrode was deposited thickness 30nm on substrate by electron beam evaporation. The Pt electrode could increase catalysis redox from electrolyte. The TiO2 micro-tube absorption and transmittance of dye were studied by UV-Vis spectrum. The morphology of TiO2 micro-tube dry etch surface was analyzed by filed emission-scanning electron microscopy (FESEM). Current-voltage characteristics were measure using Keithley 2400 sourcemeter. The dye-sensitization solar cell was measurement efficient under AM1.5, 100mW cm-2 illumination by solar simulator. The TiO2 micro-tube dye-sensitization solar cell array was through outer charge and discharge convertible circuit, and then measurement current-voltage and power.