以化學氣相沉積法成長類鑽碳薄膜之特性研究

Characterization of Diamond-like Carbon Thin Film Grown by Chemical Vapor Deposition Technology

顏昊朋(Hao-Peng Yen)

指導教授 ： 陳文瑞

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2011年)

摘要

類鑽碳膜(Diamond Like Carbon Films)是一種具備高硬度、低摩擦係數、極佳物理及化學穩定性、絕緣性及熱傳導性佳、耐磨耗等特性之薄膜，在工業上有著重要的應用。本實驗利用離子化蒸鍍法(Ion-evaporator)來沉積DLC薄膜，其中電漿源(Plasma source)是以熱燈絲(Filament)與陽極(Anode)及高溫金屬(Refractor)的三極構造的直流電弧放電離子源的離子電鍍(Ion Plating)法，此系統具有離子蒸鍍法及直流電漿CVD法等特徵。
本實驗使用苯氣(C6H6)摻入HMDSO(Hexamethyldisiloxane)氣體，在不同氣體比例下探討其薄膜內矽含量多寡對DLC薄膜的特性影響，使用拉曼光譜儀分析sp2、sp3之含量與變化，以得到一個最佳的氣體比例及熱傳導性良好的類鑽碳薄膜。

關鍵字

類鑽石碳膜 ； 類鑽碳 ； 類鑽石薄膜

並列摘要

DLC (Diamond Like Carbon) films is a kind of film that possesses high hardness, low friction, extremely good physics and chemical stability, insulating and heat-conduction is good, wear-resisting characteristic of dawdling. There is important application on industry. In this study, we used Ion Implantation (Ion-evaporator) to deposit DLC film, Among the Plasma Source used the filament, Anode And the high-temperature metal (Refractor) three electrodes structure direct current the arc discharge ion sources, this method is Ion plating. This system has ion-evaporator and DC-plasma CVD of characteristics.
This research uses Benzene (C6H6) mixture HMDSO gas, the characteristic to DLC film of the content of Si atom% influences to probe into the film under different gas proportions, used Raman spectrum to analyze the content of SP2、SP3 and change, in order to get a best gas proportion and heat-conduction of DLC films.

並列關鍵字

DLC ； Diamond-like carbon

參考文獻

[1] A.B. Vladimirov, I.S. Trakhtenberg, A.P. Rubshtein, et al., “The effect of substrate and DLC morphology on the tribological properties coating”, Diamond and Related Materials 9(2000)838-842.

[2] S. Neuville, A. Matthews, “Hard carbon coating: the way forward”, MRS Bulletin, September, 1997, p.282.

[3] B.B Pate, M.H. Hecht, C. Binns, “Photoemission and photon-stimulated ion desorption studies of diamond(111): hydrogen”, Journal of Vacuum Science Technology, 21(1981)364-367.

[4] A. Ravch, L. Martinu, H.M. Hawthome, M.R. Wertheimer, “Mechanical and tribological properties of dual-frequency plasma-deposited diamond-like carbon”, Surface and Coatings Technology, 58(1993)45-55

[5] A.A Minevich, “Wear of cemented carbide cutting inserts with multilayer Ti-based PVD coatings”, Surface and Coatings Technology, 53(1992)161.