應用二氧化鈦奈米結構於光催化之研究

Apply TiO2 Nanostructures to Photocatalysis

洪善筑(Shan-Zhu Hong)

指導教授 ： 水瑞鐏

國立虎尾科技大學/電機資訊學院/電子工程系碩士班/碩士(2014年)

https://doi.org/10.6827/NFU.2014.00151

摘要

利用射頻磁控濺鍍法在P型矽基板上製備二氧化鈦薄膜，利用不同氬氣與氧氣氣體比例、氬氣與氮氣氣體比例以及薄膜退火溫度來得到最適合應用於光催化之二氧化鈦薄膜。二氧化鈦奈米柱成長則利用化學水熱法來製備，透過不同pH值濃度與成長時間製備出二氧化鈦奈米柱結構，再將製備好的二氧化鈦薄膜與奈米柱結構進行光催化實驗。
材料分析方面，分別使用X光繞射儀、場發射掃描式電子顯微鏡、光激發螢光光譜儀之檢測，對二氧化鈦奈米結構進行晶體的結構型態、結晶型態與光激發光的特性分析，光催化分析則利用亞甲藍水溶液進行波長掃描定量分析。

關鍵字

二氧化鈦 ； 奈米柱 ； 水熱法 ； 射頻磁控濺鍍 ； 光催化

並列摘要

Titanium dioxide thin film was deposited on a p-type silicon substrate using RF magnetron sputtering. Ratio of argon to oxygen, ratio of argon to nitrogen, and annealing temperature were investigated to obtain the optimal photocatalytic reaction. Titanium dioxide nanorods prepared by chemical hydrothermal method. Effects of PH value and growth time on structure of nanorods and photocatalytic reaction were studied. Crystal structure, morphology and properties of crystalline photoluminescence of titanium dioxide thin film with nanorods were examined using X-ray diffraction, field emission scanning electron microscopy, and optical excitation fluorescence spectrometer. Photocatalysis of titanium dioxide thin film with nanorods was analyzed using a methylene blue solution.

並列關鍵字

Titanium dioxide ； Nanorods ； hydrothermal method ； RF magnetor sputtering ； Photocatalysis

參考文獻

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