- 學位論文
研究磁性膜在陽極氧化鋁模板上的磁特性及其結構影像分析
Magnetic characteristics and structural imaging analysis of the magnetic film on the anodic aluminum oxide template
摘要
本研究分為兩部分。第一部分實驗，我們使用ImageJ影像分析的軟體，分析陽極氧化鋁模板製備於不同條件下之結構。第二部分實驗，我們使用OOMMF磁性模擬程式，模擬實驗所設計的圖案化薄膜之磁特性。 多孔陽極氧化鋁(AAO)模板應用在磁性薄膜上的奈米結構生長，透過改變陽極處理溫度及電壓等製程，使得其幾何形狀能夠取得較佳的控制情形。在製作AAO模板是用一種二次陽極處理的製程，我們使用0.3M的草酸溶液作為電解液，陽極處理的電壓為20-60V，工作為溫度10-30℃。奈米孔洞的磁性薄膜或鎳鐵反點陣列的製備是利用濺鍍Ni80Fe20薄膜至AAO模板上。樣品上的磁性薄膜孔徑變化從30至90 nm。 為了比較磁滯曲線的變化並製備了在鋁基板上的Ni80Fe20薄膜，量測顯示，反點陣列的矯頑力不僅優於無圖案化的薄膜，而且改變了其完整性和孔徑的改變。結果發現到，隨著孔徑及間距的增加，矯頑力也會隨著提升。推測為缺陷的大小會阻礙磁矩的運動所造成。
並列摘要
The study is divided into two parts. The first part of the experiment, we use ImageJ image analysis software to analyze anodic aluminum oxide template structure under preparation in different conditions. The second part of the experiment, we use OOMMF magnetic simulation program, magnetic properties of simulations designed patterned thin film. Samples were obtained by two-step anodize processes. we use 0.3M oxalic acid solution as the electrolyte, the anodizing potential ranged from 20 to 60 V , and working temperature at 10-30 ℃. Films with antidot array have been prepared by the sputtering of Ni80Fe20 onto anodic alumina membrane templates. The pores diameter varies from 30 to 90 nm. A counterpart continuous thin film grown on Al substrate was also prepared. The coercivities of the antidot arrays are not only greater than those of un-patterned films, but it change by the films integrity and the pore diameter. The results show that the pore diameter become higher, the coercivity is increase. It is presumed that the parameters of the size and type of defects hinder the movement of the magnetic moment.