- 學位論文
直驅式馬達旋轉精度光電量測系統開發
Development of an Electro-Optical Measurement System for Rotational Accuracy of a Direct Drive Motor
摘要
本論文提出一種新型之旋轉誤差光學量測系統，量測系統分為旋轉徑向和軸向誤差量測以及軸向傾角誤差(Tilt Error) 量測兩部分，第一部分為利用球透鏡搭配兩組互為正交排列的半導體雷射之量測系統，用來量測出旋轉的徑向位移誤差量測量測值。目前實際應用於直驅式馬達(Direct Drive Motor)的旋轉誤差量測，其旋轉誤差為12 μm，標準差為0.8μm。第二部份利用藉由DVD雷射的角度量測模組，可量測旋轉軸向傾角誤差，最後經由數學模型運算求解出旋轉徑向和軸向傾角的實際誤差量測值。其量測直驅式馬達旋轉軸向角度傾角誤差量測值為40 arc-sec，標準差為0.3 arc-sec。 本量測方式之優點為系統不需要使用成本高昂的標準試件，在架設與操作上更為容易，整體之檢測裝置成本低廉，元件尺寸小、且量測精度高，本量測系統量測系統本身解析度可達15nm。
並列摘要
A new system of optical measurement of rotary rotational error is developed in this research. Displacement error of radial and axial rotation and tilt error of axial angular are two parts in this system. First part is the measurement system, by using a ball lens and two laser diodes that are perpendicular to each other, it determine displacement error of radial rotation. This study is applied in measurement of rotary rotational error of Direct Drive Motor, the rotary rotational error is 12μm and standard deviation is 0.8μm. Second part is angular measurement system, by DVD pickup, it is evaluated rotation of tilt error of axial angular, and then the real error values for rotational tilt error of radial and axial is determined by mathematical model. The rotary tilt error of axial angular of Direct Drive Motor is 40 arc-sec and standard deviation is 0.3 arc-sec. The advantages of this measurement system are that it doesn't need expensive standard sample, the setting and operating is easier, the overall set up stuff is cheaper, elements size is small, and measuring accuracy is higher. The analyzable is 15nm in this measurement system.