奈米級定位平台控制與可靠度測試

The Control of Nano-Positioning Stage and Reliability Test

郭峰碩(Feng-Shuo Kuo)

指導教授 ： 陳世欣

共同指導教授 ： 覺文郁(Wen-Yuh Jywe)

國立虎尾科技大學/工程學院/自動化工程研究所/碩士(2014年)

摘要

本論文運用反積分捲起PID控制器進行奈米級定位平台定位控制及進行定位平台可靠度測試，本研究主要分為兩部分，第一部份利用PID控制器進行線性馬達平台及壓電平台控制並與順滑積分控制器做比較，單軸PID步階控制精度可達±10nm，順滑積分控精度可達±50nm，PID控制器可改善步階控制精度，在X軸控制上使用Xenus驅動器，使X軸在速度追跡誤差上改善以往有的振盪現象，並使速度追跡誤差小於1.2%。
第二部分為可靠度測試，將分為三項進行實驗，第一項為熱像儀量測溫度變化，並從數據得知溫升是否影響平台精度；第二項為線性馬達平台控制之可靠度測試，透過長時間且多次實驗，X軸進行掃描運動速度誤差小於1%，Y軸直線度誤差小於50nm；第三項為燒錄後晶圓的良率，利用原子力顯微鏡(AFM)量測晶圓燒錄結果是否與控制結果一致。

關鍵字

可靠度 ； PID控制 ； 線性馬達 ； 壓電補償平台

並列摘要

This thesis uses a anti-integral PID controller to control a nano-positioning stage and conducts a reliability test of it. This study is divided into two parts. The PID controller to control the linear motor stage and piezo stage is ompared with an sliding mode controller, an axis of PID controller in order to control the step accuracy within ±10nm and siding mode controller step accuracy within ±50nm. The PID controller significantly improved the stage step accuracy, using Xenus drives improves the past some oscillation on the X-axis speed of tracing error, and speed of tracing error is less than 1.2%.
The reliability test was divided into three experiments. The first experiment measures the changes of thermal imager's temperature to determine the influence by elevation of temperature that affect the accuracy of the stage. The second experiment is a linear motor stage control reliability test which shows in long time repeated experiments. The X-axis scan motion speed error is less than 1%, and Y-axis linear error is less than 50nm. The third experiment is yield after record of the wafer, the use of atomic force microscope (AFM) measurement results are consistent with the record wafer control results.

並列關鍵字

Reliability ； PID control ； linear motor ； PZT stage

參考文獻

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