穿透式雙軸角度偏向三維光學顯微鏡

Transmission-Type Three-Dimensional Biaxial Angle-Deviation Optical Microscope

楊亞鑫(Ya-Hsin Yang)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2013年)

https://doi.org/10.6827/NFU.2013.00099

摘要

本研究提出「穿透式雙軸角度偏向三維光學顯微鏡」，是以臨界角
強度法結合CCD 光強影像分析來描繪出待測物三維表面形貌。當一平
行雷射光入射至透明待測物時，因待測物表面變化而造成出射光角度
產生些微變化，再經由旋轉平行四邊形稜鏡到適當角度可更為清楚的
觀察到光強變化。因待測物表面形貌變化與平行四邊形稜鏡內之二次
內反射率成正比，故可利用CCD 量測反射率變化進而描繪出待測物的
表面形貌。為求得另一個方向(y 方向)的角度偏向所引起的高度值，故
將待測物放置在一旋轉平臺，使其得光軸上以旋轉90o，所描繪出來的
y 方向之表面形貌與ｘ方向所得到的表面形貌做比較與計算，可獲得更
加準確的量測結果。

關鍵字

角度偏向 ； 表面形貌 ； 三維顯微鏡

並列摘要

In this study, we proposed a transmission-type biaxial angle deviation three
dimensional optical microscope. The method is based on the critical angle method and
the use of CCD detection technology to measure the three-dimensional (3-D) profile of
a transparent specimen. When a laser beam passes through the transparent specimen, the
surface height will change the beam directions causes its output ray deflect a slight
angle. Afterward the rays are incident into a parallelogram prism at the critical angle
nearby and cause the output intensity be changed. According to the basic geometrical
optics , the test ray angle on the test surface is proportional to the slope of the
surface ,then we can use a CCD to detect the change of reflectance and depict the 3-D
surface profile . In order to obtain the surface profile in another direction (the y
direction), we placed the specimen on a rotation stage and rotated it in 90 degrees in
optical axis. Finally, we compare the x-direction with y-direction of 3-D surface profile
to find the difference between them and and the real surface profile may be obtained.

並列關鍵字

angle deviation ； surface profile ； 3-D microscope

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