直接驅動式旋轉馬達旋轉精度量測系統開發

Development of the Rational Error Motion Measuring System for Direct Drive Rotational Motor

翁建德(WENG CHIEN-TE)

指導教授 ： 劉建宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本論文提出一種新型之光學量測系統，用於旋轉驅軸差檢測，元件包括凹反射鏡、分光鏡、DVD雷射讀取頭、直接驅動馬達、四象限感測器(Quadrant Detector)，主要是以DVD雷射讀取頭做為量測光源，雷射光束經過分光鏡及凹反射鏡作為聚焦元件，並利用四象限感測品作為感測元件，以量測直接驅動馬達轉動時，產生的變位誤差。
此量測的優點為，系統不需要使用標準試件，架設及操作容易，可避免標準試件之精度影響系統量測精準度，整體之檢測裝置成本低，系統可微小化。本系統位移解析度可達X軸解析度為7nm；Y軸解析度為8nm，在100μm位移距離最大誤差約-1.5μm ~+1.5μm，標準差在0.15μm以內。本論文開發的光學量測系統位移解析度60nm，在100μm位移距離最大線性誤差約±1 μm，標準差在0.15以內。本量測系統實際應用於直接驅動馬達旋轉軸之轉速在1 rpm、5rpm、10 rpm之旋轉誤差分別為1.138、1.166、1.199。標準差分別為0.012μm、0.004μm、0.004μm。

關鍵字

旋轉軸誤差 ； 凹反射鏡 ； 直接驅動馬達 ； 四象限感測器 ； DVD雷射讀取頭

並列摘要

The abstract present paper proposed one new optical measurements system, uses in revolving drives the axis difference examination, the part including the concave reflector, the spectroscope, the DVD laser read, the direct drive motor, four quadrant sensory elements (Quadrant Detector), mainly is does take DVD laser read as the gauging photosource, the laser light beam focuses the part after the spectroscope and the concave reflector achievement, and using four quadrant feelings measured measures the part as the feeling, gauges when the direct drive motor rotates, produces dislodgement error.
This gauging merit is, the system does not need to use the standard test sample, erects and operates easily, may avoid precision of influence system the standard test sample gauging fine, of detector set cost the whole is low, the system may small. This system displacement resolution may reach X axis resolution is 7nm; The Y axis resolution is 8nm, is away from the biggest error at the 100μm displacement approximately - 1.5μm ~+1.5μm, standard deviation in 0.15μm within. Present paper development optical measurements system displacement resolution 60nm, is away from the biggest miss distance at 100μm the displacement approximately ±1μm, standard deviation in 0.15.This gauging system practical application rotational speed of in the direct drive motor rotation axis of rotation error in 1 rpm, 5rpm, 10 rpm respectively is 1.138, 1.166, 1.199.The standard deviation respectively is 0.012μm, 0.004μm, 0.004μm.

並列關鍵字

Rotation axis error ； concave reflector ； Direct Drive Motor ； Quadrant Detector ； DVD laser read head

參考文獻

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[5] 陳俊仁，“使用雷射四像儀檢測精密機具性能”，國立成功大學機械工程學系碩士論文，2003