穿透式三維光電顯微鏡非線性誤差補償之研究

Transmission-Type Three-Dimensional Optical Microscope with Nonlinear Compensation

蔡明宏(Ming-Hung Tsai)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2012年)

https://doi.org/10.6827/NFU.2012.00159

摘要

本文提出「穿透式三維光電顯微鏡非線性誤差補償之研究」，本方法以臨界角強度法檢測技術結合CCD影像擷取技術來描繪出待測物之三維表面形貌。當一光束經過透明待測物時，因待測物表面輪廓的變化，造成穿透的光束會有些微角度偏移，再經由平行四邊形稜鏡形成靈敏出射光強度變化。由一階光學近似公式與內反射公式得知，透明待測物的表面輪廓變化正比於平行四邊形內兩次之內反射率，且反比於二次內反射率對外角之斜率變化，所以反射率變化量與高度成正比，最後藉由擷取兩張影像，經計算後就可求得待測物實際高度。由於二次內反射率相對於表面高度之關係為非線性函數，故需加以補償修正，以減少量測上的誤差。本文中之光學放大倍率為50倍，可觀測待測物橫向解析度為0.42μm，縱向解析度為0.72nm，經非線性補償之後可減少誤差至3.23%，高度可量測範圍為幾十奈米至數微米之間。

關鍵字

CCD ； 臨界角 ； 顯微鏡 ； 三維形貌

並列摘要

In this study, we proposed a transmission-type three-dimensional optical microscope with nonlinear compensation. The method is based on the critical angle method and the use of CCD detection technology to measure the 3-D profile of a transparent specimen. When a beam passes through the transparent specimen, the surface height or the refractive index will change the beam directions causes its output ray deflect a slight angle. Afterward the rays are incident into a parallelogram prism at the critical angle nearby and cause the output intensity be changed. By the first-order optical approximation and the formula of internal reflection, the reflectivity of the prism is proportional to the surface height. We should use a CCD sensor to be located at the image plane to record the critical angle or total reflection images. Finally, using the Matlab program to analyze the surface height of the specimen, and conpensate the nonlinear error due to the nonlinear curve of reflectivity, the three-dimensional profile of the test specimen is obtained.

並列關鍵字

CCD ； critical angle ； microscope ； three-dimension

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