- 學位論文
反應式磁控濺鍍製備SS/CrxNy/CrN/CrOxN1-x/AlxOy多層干涉選擇性吸收薄膜之研究
CrxNy/CrN/CrOxN1-x/AlxOy Selective Absorption Film On Stainless Steel Substrate By Using Reactive Magnetron
摘要
太陽能選擇性吸收膜具優良光熱轉換性能，其中光干涉多層堆疊式吸收膜因具良好高溫性能，適用於高溫聚光型集熱器；以真空反應磁控濺鍍法製備多層堆疊吸收膜具製程穩定性高、膜層品質良好之優點，且可減少環境污染。 本研究利用反應式磁控濺鍍法製備不銹鋼/氮化鉻/氮氧化鉻/氧化鋁堆疊式吸收膜(SS/CrxNy/CrN/CrOxNy/AlxOy)，探討濺鍍功率與氮氣通量對膜層結構成分及光學性能的影響；改變膜層成分及厚度，觀察其對多層堆疊吸收膜光學性能的影響，並探討其高溫熱穩定性。利用TEM與SEM觀測膜層結構與表面形貌，以UV-VIS-NIR及FTIR裝置一積分球量測光學性質，包括吸收率(α)與熱輻射率(ε)，利用XRD鑑定相結構。 結果顯示，基板350℃加熱製備SS/CrxNy (40 nm) /CrN (40 nm) /CrOxN1-x (25 nm) /未加熱AlxOy (50 nm)其α/ε＝0.942/0.09。熱穩定實驗結果顯示，該多層膜吸收性質(α/ε)最終穩定由0.942/0.09改變至0.90/0.05,轉換效率由10.4提升至18，實驗證實此多層薄膜為良好的光吸收體。
並列摘要
The important principle of selective absorption film is applied to the absorption of solar which is widely promoted the develop of solar thermal, and light interfere multilayer film has the best convert efficacy. Using in low-temperature and high temperature concentrating solar collector. The reactive magnetron sputtering method has the advantage of high-stability, well quality-film and reduce the pollution of environmental. Our study uses reactive magnetron sputtering method to prepare (SS/CrxNy/CrN/CrOxNy/AlxOy), in different power and nitrogen flow over the substrate. Mainly focus on adding film density and promoting the combining of multilayer and the stability of absorption film. Using TEM and SEM observe structure and surface morphology, UV-VIS-NIR and FTIR measure optical property. Furthermore, Chromium nitride and Chromium oxynitride use XRD to identify phase structure. According to different index of refraction, preparing slope composite interfere pile to combine the AlxOy AR layer of absorption film. investigating nitride、oxynitride type and the influence of absorptance(α) and thermal emission(ε) verse thickness change. Finally, studying the thermal stability of multilayer absorption film. The result show that the substrate heats in 350 ℃ to prepare SS/CrxNy (40 nm) /CrN (40 nm) /CrOxN1-x (25 nm) /AlxOy (50 nm), in this part AlxOy layer in non-heated. The result show that the α/ε of SS/CrxNy (40 nm) /CrN (40 nm) /CrOxN1-x (25 nm) /AlxOy (50 nm) is 0.942/0.09 after heating. The results of the thermal stability test indicated that the absorption of multilayer steady changed from 0.942/0.09 to 0.90/0.05 finally. the convert efficiency increases from 10.4 to 18. That shows the multilayer is a great light absorbent material.