高頻高壓變壓器之模型與應用

Application and Modeling of High Frequency High Voltage Transformer

陳彥豪(Yan-Hao Chen)

指導教授 ： 張永農

國立虎尾科技大學/電機資訊學院/電機工程研究所/碩士(2011年)

摘要

本研究主要提出一套高頻高壓變壓器等效電路模型建立方法，並將其應用於電漿產生器。當變壓器操作於高頻高壓時，會產生較大的雜散電容效應，而傳統之變壓器模型無法完整呈現其特性；本研究針對高頻變壓器進行特性量測分析，證實雜散電容之存在及重要性，並提出不同於傳統量測方法，僅以簡易量測儀器及方波電源測試，搭配電路特性推算，即可建構包含雜散電容之高頻高壓變壓器等效模型；透過模擬軟體MATLAB及IsSpice驗證模型之準確性。本文將高頻高壓變壓器應用於一部電漿產生器，採用串聯式負載共振轉換器架構，藉由量測分析電漿產生器在高壓放電之特性，建構電漿反應器於額定負載時之等效模型，隨著電漿產生器系統模型之建立，即可設計共振電路參數，利用IsSpice電路模擬軟體，比較模擬與實測結果，驗證模型之準確性。並提供一套高頻高壓變壓器等效電路模型建立方法及高頻高壓電源供應器設計流程。

關鍵字

電漿產生器 ； 串聯式負載共振轉換器 ； 雜散電容 ； 高頻高壓變壓器

並列摘要

The thesis presents an equivalent circuit of high frequency and high voltage transformer model and applied to AC plasma generator. Nevertheless, due to the insulation design of transformer under high-voltage application, the parasitic capacitance existing between insulating papers can no more be neglected, but play an important role in the design of resonant circuit. The equivalent circuit of the high-frequency transformer modeled by the introduction of the stray capacitance effect is proposed. This thesis presents a simple method to measure equivalent circuit parameters of the high-frequency, high-voltage transformer with stray capacitance being introduced into the conventional modeling. The simulation results based on MATLAB and IsSpice are used to verify the proposed method. In this research, a plasma generator composed of high-frequency, high-voltage transformer. Accordingly, a serial-load resonant converter plasma generator is realized and a valuable and useful design procedure is set up and presented. The circuit model of the high-voltage plasma generator is conducted as well. Thus, the overall model of the high-voltage corona discharger is built and the designing procedures for the appropriate selection of the corresponding resonant-circuit parameters can be established. Based on IsSpice, the simulated results point out the validity and effectiveness of the proposed approach. The practical measurements also support the availability of this research.

並列關鍵字

Plasma generator ； Series load-resonant converter ； Stray capacitance ； High-frequency high-voltage transformer

參考文獻

33.鄭穎聰，“高頻高壓電暈產生器應用與研製”，國立虎尾科技大學電機工程系碩士學位論文，民國98年7月。

2.李志勇，“應用於電漿負載之電源供應器研製實現”，成功大學電機工程系碩士論文，民國96年7月。

4.V. A. Spassov, M. Ueda, J. Barroso and L. Gueorguiev, “A High-Voltage Pulse Generator for Plasma Ion Immersion Implantation Application”, IEEE Pulse Power conference, vol.2, pp. 1530-1535, 1997.

5.P. Wang, G. Zhang, “The Measurement Method for Corona Discharge Current Under High-Voltage Environment”, IEEE Transactions on Instrumentation and Measurement, vol.57, august 2008.

6.J. G. Cho, J.A. Sabate, G.C. Hua, F.C. Lee,“Zero-Voltage and Zero-Current-Switching Full Bridge PWM Converter for High-Power Applications”, IEEE Transactions on Power Electron,Vol.11, No.4, pp.622-628, July 1996.