利用鈣測試法量測水氣滲透率之研究

Study on The Water Vapor Transmission Rate Using Calcium Test Method

黎國科(Quoc-Khoa Le)

指導教授 ： 劉代山

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2013年)

摘要

本研究利用電漿增強化學氣相沉積系統，以四甲基矽烷、氧氣和氨氣為源材料，在聚對苯二甲酸乙二醇塑膠基板上，分別沉積氧化矽及氮氧化矽單層薄膜。透過鈣測試方法量測其水氣滲透率，接著探討以氧化矽及氮氧化矽薄膜當作水氣阻障層，在大氣環境下，其水氣滲透率之變化。透過研究結果顯示，經由鈣測試方法所量測之水氣滲透率，可與商用MOCON水氣滲透率機台所量測之數據達到相同程度。利用有機矽基/無機氧化矽薄膜多層薄膜沉積於塑膠基板上，多層堆疊結構方式可藉由鈣測試量測方法評估其較低的水氣滲透率，以提高塑膠基板的阻水氣滲透，並增加光電元件的可靠性。

關鍵字

鈣測試 ； 水氣滲透率 ； PECVD ； 阻隔層

並列摘要

In this study, a single barrier layer structure (SiOxNy, SiOx) was deposited onto the polyethylene terephthalate (PET) substrate by plasma-enhanced chemical vapor deposition (PECVD) using TMS-amonia(NH3)-oxygen mixture gas source separately. The water vapor transmission rate was evaluated by using different Calcium corrosion Test. This research highlights the water vapor transmission rate of bare PET substrate and barrier coatings layer (SiOxNy or SiOx) at air ambient conditions . It was found that the results of water vapor transmission rate of bare PET and barrier layer by Calcium Test were achieved the same level of WVTR compared with MOCON standard measurement. Calcium Test methods is the most promising methods for the evaluation ultra-low WVTR of multi-barrier layer films.The stacked of organosilicon/SiOxNy or multi-barrier structure will be deposited on PET substrate which promise to achieve an ultra-low WVTR and high mechanism reliability apply for thin-film packaging in the flexible optoelectronic devices.

並列關鍵字

Calcium Test ； water vapor transmission rate ； PECVD ； barrier

參考文獻

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