使用位置感測器之低成本精密機具量測系統開發

隨著科技的進步，產品邁入微小化，加工機的精度也必須提升，傳統的檢測儀器（雷射干涉儀和自動視準儀等）價格昂貴，且須較長的檢測時間。本研究發展高精度、低成本及快速檢測的量測系統，可應用於多軸工具機、三次元量床及轉盤等工具母機進行檢測。本文建立三套量測系統包含位置感測器（QD）平板量測系統、雷射陣列平板量測系統及六自由度轉盤量測系統。　　QD平板量測系統使用16顆QD及雷射光源建立精密機具校正系統，本文並建立取代商用級位置感測器訊號處理器之電路模組，以達到建立簡易操作、高精度及低成本之量測系統。由實驗結果顯示，此系統的量測精度優於1 μm。雷射陣列平板量測系統是由27顆二極體雷射及3顆位置感測器（PSD）所建構而成，此架構可透過增加雷射光源的數目達到增加量測範圍之目的，可在不增加位置感測器的數目下，倍增整體系統的量測範圍，且可應用於三維空間定位檢測及三維空間任意軌跡循軌檢測。由實驗結果顯示，此系統的量測精度可達到1 μm以下。六自由度轉盤量測系統是由12顆二極體雷射所建構而成的雷射塔及3個PSD所組合的量測系統，可應用於任何類型的轉盤檢測，本架構可透過增加二極體雷射的數量，來達到校正更多角位置的六自由度誤差。由實驗結果顯示，此系統的線性軸量測精度可達1 μm以下，角位移量測精度可達1 arc sec以下。

關鍵字

精密機具校正；位置感測器；三維空間定位檢測；六自由度量測系統

並列摘要

With the progress of technology, products are getting miniaturized such that the precision of tool machines has to be improved. Conventional measurement instruments such as laser interferometers and autocollimators are expensive and time-consuming in measurement. In this research, the measurement system with high-precision, low-cost and high measurement speed is developed to be applied to the measurement of tool machines such as the multi-axis machine tools, the coordinate measuring machine (CMM), the indexing table and other tools. The planar QD measurement system utilizes 16 QDs and the light source by Laser to establish the correction system of precision tool machines. In this study, a circuit module is also realized to replace commercial signal processor of positioning sensors to construct a measurement system with simple operation, high-precision, and low-cost. From the experimental results, the accuracy of the system is better than 1μm. Laser-array based planar measurement system is constructed by 27 Laser diodes and 3 position sensor devices (PSD). The structure can augment the measurement range by increasing the number of Laser sources. It can increase by times the measurement range of the entire system and can be applied to 3-D spatial position measurement and 3-D spatial trajectory tracking measurement. From the experimental results, the accuracy of the measurement system can be under 1μm. The 6-DOF indexing performance measurement system consists of 3 PSDs and a laser tower which includes 12 laser diodes and a fixture are installed to be used in the measurement of any type of rotary tables. With this system, the precision of indexing performance can be increased by adding more laser diodes. The experimental results show that the measurement accuracy of this system can attain at least up to 1 arc sec.

並列關鍵字

machine tool calibration ； position sensing detection ； 3Dspatial position test ； 6-degree of freedom measurement system.

參考文獻

1. J. Tlusty, “System and Methods for Testing Machine Tools,” Microtechnic, Vol. 13, pp. 162, 1959.

Google Scholar

2. G. Zhang, R. Veale, T. Charlton, B. Borchardt, R. Hoken, “Error compensation of coordinate measuring machine”, Ann CIRP, Vol. 34, No.1, pp. 445-448, 1985.

Google Scholar

3. G.X. Zhang, Y.F. Zang, “A method for machine geometry calibration using 1-D ball array,” Ann. CIRP, Vol. 40, No.1, pp. 519-522, 1991.

Google Scholar

4. P.S. Lingard, M.E. Purss, C.M. Sona, E.G. Thwaite, “Length-bar and step-stage calibration using a laser measurement system with a coordinate measuring machine,” Ann. CIRP, Vol. 40, No.1, pp. 515-517, 1991.